Fabrication of periodically ordered diamond nanostructures by microsphere lithography

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21110%2F14%3A00223275" target="_blank" >RIV/68407700:21110/14:00223275 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/14:00438716 RIV/68407700:21340/14:00223275

Výsledek na webu

<a href="http://dx.doi.org/10.1002/pssb.201451172" target="_blank" >http://dx.doi.org/10.1002/pssb.201451172</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssb.201451172" target="_blank" >10.1002/pssb.201451172</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Fabrication of periodically ordered diamond nanostructures by microsphere lithography

Popis výsledku v původním jazyce

Structured diamond films are required for several uses as photonic crystals, (bio-) sensors, biomedicine, etc. Often, these uses require fabrication of nano-sized features with the assistance of lithographic techniques. In this paper, we demonstrate thegrowth of diamond structures well ordered in periodic arrays. The technological process starts with ultrasonic seeding of Si substrates by ultra-dispersed detonation diamond nanoparticles. Then, a monolayer of polystyrene microspheres (PS) is deposited on seeded Si substrates by Langmuir-Blodgett method. The primary diameter of PS varies from 253 to 940nm. The self-assembled PS are employed as a mechanical mask for reactive ion etching of the seeding layer via reducing the PS diameter down. The seedingstructures remained under reduced PS were used for growing periodically ordered diamond arrays by microwave plasma-assisted chemical vapor deposition from a hydrogen rich gas mixture. Cross-section SEM images reveal that the diameter and

Název v anglickém jazyce

Fabrication of periodically ordered diamond nanostructures by microsphere lithography

Popis výsledku anglicky

Structured diamond films are required for several uses as photonic crystals, (bio-) sensors, biomedicine, etc. Often, these uses require fabrication of nano-sized features with the assistance of lithographic techniques. In this paper, we demonstrate thegrowth of diamond structures well ordered in periodic arrays. The technological process starts with ultrasonic seeding of Si substrates by ultra-dispersed detonation diamond nanoparticles. Then, a monolayer of polystyrene microspheres (PS) is deposited on seeded Si substrates by Langmuir-Blodgett method. The primary diameter of PS varies from 253 to 940nm. The self-assembled PS are employed as a mechanical mask for reactive ion etching of the seeding layer via reducing the PS diameter down. The seedingstructures remained under reduced PS were used for growing periodically ordered diamond arrays by microwave plasma-assisted chemical vapor deposition from a hydrogen rich gas mixture. Cross-section SEM images reveal that the diameter and

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

physica status solidi (b)

ISSN

0370-1972

e-ISSN

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Svazek periodika

251

Číslo periodika v rámci svazku

12

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

6

Strana od-do

2587-2592

Kód UT WoS článku

000345830900044

EID výsledku v databázi Scopus

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