Fabrication of periodically ordered diamond nano-structures by nanosphere lithography

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21110%2F14%3A00218871" target="_blank" >RIV/68407700:21110/14:00218871 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21340/14:00218871

Výsledek na webu

<a href="http://www.iwepnm.org/fileadmin/announcements/2014/IWEPNM_2014_abstractbook.pdf" target="_blank" >http://www.iwepnm.org/fileadmin/announcements/2014/IWEPNM_2014_abstractbook.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Fabrication of periodically ordered diamond nano-structures by nanosphere lithography

Popis výsledku v původním jazyce

Structured diamond films are required for several uses as photonic crystals, (bio-) sensors, biomedicine, etc. Often, these uses require fabrication of nano-sized features with assistance of EBL or FIB techniques. However, EBL/FIB techniques are expensive and time consuming; especially for processing large areas. Nanosphere lithography offers an economically acceptable alternative. Here we present a technology which allows a fabrication of periodically ordered diamond nano-structures over large areas. The technological process starts with the deposition of polystyrene spheres (PS) monolayer (spheres 250 or 471 nm) on seeded quartz or Si substrates by Langmuir-Blodgett method. The self-assembled PS are employed as a mask for reactive ion etching (RIE) used for reducing a PS diameter to 100 and 200 nm, respectively. The processed substrates are finally used for growing arrays of ordered diamond nano-structures. The geometry of formed arrays is controlled by PS diameter (100-1500 nm) and

Název v anglickém jazyce

Fabrication of periodically ordered diamond nano-structures by nanosphere lithography

Popis výsledku anglicky

Structured diamond films are required for several uses as photonic crystals, (bio-) sensors, biomedicine, etc. Often, these uses require fabrication of nano-sized features with assistance of EBL or FIB techniques. However, EBL/FIB techniques are expensive and time consuming; especially for processing large areas. Nanosphere lithography offers an economically acceptable alternative. Here we present a technology which allows a fabrication of periodically ordered diamond nano-structures over large areas. The technological process starts with the deposition of polystyrene spheres (PS) monolayer (spheres 250 or 471 nm) on seeded quartz or Si substrates by Langmuir-Blodgett method. The self-assembled PS are employed as a mask for reactive ion etching (RIE) used for reducing a PS diameter to 100 and 200 nm, respectively. The processed substrates are finally used for growing arrays of ordered diamond nano-structures. The geometry of formed arrays is controlled by PS diameter (100-1500 nm) and

Druh

O - Ostatní výsledky

CEP obor

JK - Koroze a povrchové úpravy materiálu

OECD FORD obor

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Projekt

<a href="/cs/project/GA13-20110S" target="_blank" >GA13-20110S: Nové substráty a přístupy pro citlivý a reprodukovatelný biomolekulární senzing pomocí spektroskopie povrchem zesíleného Ramanova rozptylu (SERS)</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů