Novel concepts for low-pressure, low-temperature nanodiamond growth using MW linear antenna plasma sources

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22340%2F10%3A00023577" target="_blank" >RIV/60461373:22340/10:00023577 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Novel concepts for low-pressure, low-temperature nanodiamond growth using MW linear antenna plasma sources

Popis výsledku v původním jazyce

Industrial applications of PE MWCVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, high- density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linearantenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 10 El 1 cm-3), accompanied by data from OES for CH4 - CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown.

Název v anglickém jazyce

Novel concepts for low-pressure, low-temperature nanodiamond growth using MW linear antenna plasma sources

Popis výsledku anglicky

Industrial applications of PE MWCVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, high- density coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linearantenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge. We present data on high plasma densities in this type of discharge (> 10 El 1 cm-3), accompanied by data from OES for CH4 - CO2 - H2 gas chemistry and the basic properties of the nano-crystalline diamond (NCD) films grown.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2010

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Mater.Res.SocietySymp.Proceedings

ISSN

0272-9172

e-ISSN

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Svazek periodika

1203

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

6

Strana od-do

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Kód UT WoS článku

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EID výsledku v databázi Scopus

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