Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61388998%3A_____%2F20%3A00533159" target="_blank" >RIV/61388998:_____/20:00533159 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/20:00533159 RIV/68407700:21110/20:00338917 RIV/68407700:21340/20:00338917

Výsledek na webu

<a href="https://doi.org/10.1088/1361-665X/ab4e0c" target="_blank" >https://doi.org/10.1088/1361-665X/ab4e0c</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-665X/ab4e0c" target="_blank" >10.1088/1361-665X/ab4e0c</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor

Popis výsledku v původním jazyce

Resonance based mass sensors are able to sense tiny fractions of grams based on the resonant frequency shift of a resonator when the resonator is subjected to changes in attached mass or temperature. In our work, NiTi/Si micro-bridge with a design of tunable resonance based sensor was fabricated using Xe plasma FIB. Before fabricating the micro-bridge, an influence of various Xe FIB currents on the transformational behavior of NiTi films was tested. In the other part of the present study, the effect of temperature on the vibrating NiTi/Si micro-bridge was examined in a broad range of frequencies. It is suggested that the NiTi film can work as a frequency tuning element in resonance based mass sensors. The shift of the first resonant frequencies of NiTi/Si bilayer micro-bridge with the length, width, thickness and the NiTi/Si thickness ratio being 200 μm, 40 μm, 5.8 μm and 0.29, respectively, is up to 7 % with temperature ranging from 25°C to 100°C during heating up.n

Název v anglickém jazyce

Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor

Popis výsledku anglicky

Resonance based mass sensors are able to sense tiny fractions of grams based on the resonant frequency shift of a resonator when the resonator is subjected to changes in attached mass or temperature. In our work, NiTi/Si micro-bridge with a design of tunable resonance based sensor was fabricated using Xe plasma FIB. Before fabricating the micro-bridge, an influence of various Xe FIB currents on the transformational behavior of NiTi films was tested. In the other part of the present study, the effect of temperature on the vibrating NiTi/Si micro-bridge was examined in a broad range of frequencies. It is suggested that the NiTi film can work as a frequency tuning element in resonance based mass sensors. The shift of the first resonant frequencies of NiTi/Si bilayer micro-bridge with the length, width, thickness and the NiTi/Si thickness ratio being 200 μm, 40 μm, 5.8 μm and 0.29, respectively, is up to 7 % with temperature ranging from 25°C to 100°C during heating up.n

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20501 - Materials engineering

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Smart Materials and Structures

ISSN

0964-1726

e-ISSN

—

Svazek periodika

29

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

10

Strana od-do

1-10

Kód UT WoS článku

000499407300001

EID výsledku v databázi Scopus

2-s2.0-85081063030