Correlation between SiOx content and properties of DLC : SiOx films prepared by PECVD.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F03%3A49033170" target="_blank" >RIV/61389005:_____/03:49033170 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216224:14310/03:00021418

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Correlation between SiOx content and properties of DLC : SiOx films prepared by PECVD.

Popis výsledku v původním jazyce

Hard diamond-like carbon (DLC) films with an addition of SiOx were deposited in capacitively coupled r.f. discharges from a mixture of methane and hexamethyldisiloxane (HMDSO). The flow rate of HMDSO was changed in order to vary the SiOx content in the films. Complete atomic composition of the films was determined by Rutherford backscattering spectroscopy combined with elastic recoil detection analysis. The thickness and the optical properties were obtained from the ellipsometric measurements. The mechanical properties were studied by a depth sensing indentation technique using Fischerscope H100 tester. The O/Si ratio in DLC:SiOx films was 0.286 +/- 0.008 and the content of SiOx increased with the HMDSO-to-methane flow rate ratio q. The DLC:SiOx filmswere close to DLC films as concerning the optical properties in the UV/visible and the high hardness if q was maximum 0.25. However, the compressive stress in the films was reduced, the film fracture toughness was improved and the deposit

Název v anglickém jazyce

Correlation between SiOx content and properties of DLC : SiOx films prepared by PECVD.

Popis výsledku anglicky

Hard diamond-like carbon (DLC) films with an addition of SiOx were deposited in capacitively coupled r.f. discharges from a mixture of methane and hexamethyldisiloxane (HMDSO). The flow rate of HMDSO was changed in order to vary the SiOx content in the films. Complete atomic composition of the films was determined by Rutherford backscattering spectroscopy combined with elastic recoil detection analysis. The thickness and the optical properties were obtained from the ellipsometric measurements. The mechanical properties were studied by a depth sensing indentation technique using Fischerscope H100 tester. The O/Si ratio in DLC:SiOx films was 0.286 +/- 0.008 and the content of SiOx increased with the HMDSO-to-methane flow rate ratio q. The DLC:SiOx filmswere close to DLC films as concerning the optical properties in the UV/visible and the high hardness if q was maximum 0.25. However, the compressive stress in the films was reduced, the film fracture toughness was improved and the deposit

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/KSK1010104" target="_blank" >KSK1010104: Fyzika kondenzovaných systémů a materiálový výzkum</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2003

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

SURFACE & COATINGS TECHNOLOGY

ISSN

0257-8972

e-ISSN

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Svazek periodika

174

Číslo periodika v rámci svazku

N/A

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

5

Strana od-do

281-285

Kód UT WoS článku

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EID výsledku v databázi Scopus

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