Effect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F19%3A00518743" target="_blank" >RIV/61389005:_____/19:00518743 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/60461373:22310/19:43919253 RIV/44555601:13440/19:43894751

Výsledek na webu

<a href="https://doi.org/10.1016/j.nimb.2019.09.043" target="_blank" >https://doi.org/10.1016/j.nimb.2019.09.043</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.nimb.2019.09.043" target="_blank" >10.1016/j.nimb.2019.09.043</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Effect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA

Popis výsledku v původním jazyce

Our research is devoted to the shrinkage and swelling of PMMA film after micro-structuring with ion beam lithography. 10 MeV O4+ ions were used in the experiment. Parallel lines of 1 mm in length and 10 mu m in thickness were created. The number of scan cycles and ion fluence were varied. The influence of the irradiation regime on PMMA elemental composition in micro-structured parts and microstructure morphology were studied. It was shown that microstructures created in PMMA film undergo both shrinkage and swelling processes depending on both the scan speed and the fluence. For the same fluence, shrinkage appears at fast scan speeds and swelling at slow ones. The same phenomenon was found in relation to the fluence for the same scan speed. It was observed that PMMA film rupture caused by irradiation occurred prior to the start of the carbonization of the irradiated area.

Název v anglickém jazyce

Effect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA

Popis výsledku anglicky

Our research is devoted to the shrinkage and swelling of PMMA film after micro-structuring with ion beam lithography. 10 MeV O4+ ions were used in the experiment. Parallel lines of 1 mm in length and 10 mu m in thickness were created. The number of scan cycles and ion fluence were varied. The influence of the irradiation regime on PMMA elemental composition in micro-structured parts and microstructure morphology were studied. It was shown that microstructures created in PMMA film undergo both shrinkage and swelling processes depending on both the scan speed and the fluence. For the same fluence, shrinkage appears at fast scan speeds and swelling at slow ones. The same phenomenon was found in relation to the fluence for the same scan speed. It was observed that PMMA film rupture caused by irradiation occurred prior to the start of the carbonization of the irradiated area.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10301 - Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Nuclear Instruments & Methods in Physics Research Section B

ISSN

0168-583X

e-ISSN

—

Svazek periodika

461

Číslo periodika v rámci svazku

12

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

6

Strana od-do

175-180

Kód UT WoS článku

000501391200032

EID výsledku v databázi Scopus

2-s2.0-85072937886