Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F67985807%3A_____%2F23%3A00579923" target="_blank" >RIV/67985807:_____/23:00579923 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.3390/cryst13121659" target="_blank" >https://doi.org/10.3390/cryst13121659</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/cryst13121659" target="_blank" >10.3390/cryst13121659</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method

Popis výsledku v původním jazyce

In this study, an axisymmetric Czochralski furnace model for the LEC growth of gallium arsenide is presented. We produced 88 datasets through computational fluid dynamics simulations. Among the many parameters that affect crystal growth, a total of 13 input parameters were selected, including the geometry and material parameters of the hot zone (crucible, heaters, radiation shield, and crystal), as well as the process parameters (such as pulling and rotation rates, heating power, etc.). Voronkov criteria (v/Gn), interface deflection, and the average interface temperature gradient were selected as the output parameters. We carried out a correlation analysis between the variables and used decision trees to study the impact of the 13 input variables on the output variables. The results indicated that in the growth of gallium arsenide, the main factor affecting interface deflection and the average interface thermal gradients is the crucible rotation rate. For v/Gn, it is the pulling rate.

Název v anglickém jazyce

Decision Tree-Supported Analysis of Gallium Arsenide Growth Using the LEC Method

Popis výsledku anglicky

In this study, an axisymmetric Czochralski furnace model for the LEC growth of gallium arsenide is presented. We produced 88 datasets through computational fluid dynamics simulations. Among the many parameters that affect crystal growth, a total of 13 input parameters were selected, including the geometry and material parameters of the hot zone (crucible, heaters, radiation shield, and crystal), as well as the process parameters (such as pulling and rotation rates, heating power, etc.). Voronkov criteria (v/Gn), interface deflection, and the average interface temperature gradient were selected as the output parameters. We carried out a correlation analysis between the variables and used decision trees to study the impact of the 13 input variables on the output variables. The results indicated that in the growth of gallium arsenide, the main factor affecting interface deflection and the average interface thermal gradients is the crucible rotation rate. For v/Gn, it is the pulling rate.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10201 - Computer sciences, information science, bioinformathics (hardware development to be 2.2, social aspect to be 5.8)

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Crystals

ISSN

2073-4352

e-ISSN

2073-4352

Svazek periodika

13

Číslo periodika v rámci svazku

12

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

16

Strana od-do

1659

Kód UT WoS článku

001130951800001

EID výsledku v databázi Scopus

2-s2.0-85180658215