Estimation of mechanical parameters of thin films using finite element analysis

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081723%3A_____%2F18%3A00494051" target="_blank" >RIV/68081723:_____/18:00494051 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68081731:_____/18:00494051

Výsledek na webu

<a href="http://dx.doi.org/10.31224/osf.io/3adt5" target="_blank" >http://dx.doi.org/10.31224/osf.io/3adt5</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.31224/osf.io/3adt5" target="_blank" >10.31224/osf.io/3adt5</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Estimation of mechanical parameters of thin films using finite element analysis

Popis výsledku v původním jazyce

This study shows a methodology to estimate mechanical parameters of thin films by means of a bulgentest and a numerical approach. The methodology is based on the combination of finite element analysis with anclassical analytical method. Finite element modelling was conducted for monolayer (Si3N4) membranes of 2x2mmnwith the aim to approximate both the load-deflection curves experimentally measured and the classical loaddeflectionnanalytical model. Error functions were constructed and minimized to delimit a coupled solution spacenbetween Young’s modulus and Poison’s ratio. In a traditional bulge test analysis only one of the elastic propertiesncan be determined due to that there is not unique solution in the estimations of these parameters. However, bothnelastic parameters were determined through the proposed numerical procedure which compares the deformednsurfaces for a specific set of optimal elastic parameters computed. Results shows that the estimated elasticnproperties agree with corresponding values determined by other methods in the literature

Název v anglickém jazyce

Estimation of mechanical parameters of thin films using finite element analysis

Popis výsledku anglicky

This study shows a methodology to estimate mechanical parameters of thin films by means of a bulgentest and a numerical approach. The methodology is based on the combination of finite element analysis with anclassical analytical method. Finite element modelling was conducted for monolayer (Si3N4) membranes of 2x2mmnwith the aim to approximate both the load-deflection curves experimentally measured and the classical loaddeflectionnanalytical model. Error functions were constructed and minimized to delimit a coupled solution spacenbetween Young’s modulus and Poison’s ratio. In a traditional bulge test analysis only one of the elastic propertiesncan be determined due to that there is not unique solution in the estimations of these parameters. However, bothnelastic parameters were determined through the proposed numerical procedure which compares the deformednsurfaces for a specific set of optimal elastic parameters computed. Results shows that the estimated elasticnproperties agree with corresponding values determined by other methods in the literature

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

<a href="/cs/project/EF16_013%2F0001823" target="_blank" >EF16_013/0001823: Modernizace Infrastruktury pro studium a aplikaci pokročilých materiálů (m-IPMinfra)</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Applied Mechanics 2018

ISBN

978-80-261-0766-8

ISSN

—

e-ISSN

—

Počet stran výsledku

6

Strana od-do

157-162

Název nakladatele

Západočská univerzita v Plzni

Místo vydání

Plzeň

Místo konání akce

Myslovice

Datum konání akce

9. 4. 2018

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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