The EBSD spatial resolution of a Timepix-based detector in a tilt-free geometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081723%3A_____%2F21%3A00542399" target="_blank" >RIV/68081723:_____/21:00542399 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0304399121000826?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0304399121000826?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.ultramic.2021.113294" target="_blank" >10.1016/j.ultramic.2021.113294</a>

Jazyk výsledku

angličtina

Název v původním jazyce

The EBSD spatial resolution of a Timepix-based detector in a tilt-free geometry

Popis výsledku v původním jazyce

Performing EBSD with a horizontal sample and a parallel EBSD detector sensor, enables safer specimen movements for data collection of large specimen areas and improves the longitudinal spatial resolution. The collection of electron backscattering patterns (EBSPs) at normal incidence to the electron beam has been revisited via the use of a direct electron detection (DED) sensor. In this article we present a fully operational DED EBSD detection system in this geometry, referred to as the tilt-free geometry. A well-defined Σ=3[101]{121} twin boundary in a Molybdenum bicrystal was used to measure the physical spatial resolution of the EBSD detector in this tilt-free geometry. In this study, two separate methods for estimating the spatial resolution of EBSD, one based on a pattern quality metric and the other on a normalised cross correlation coefficient were used. The spatial resolution was determined at accelerating voltages of 8 kV, 10 kV, 12 kV, 15 kV and 20 kV ranging from ~22−38 nm using the pattern quality method and ~31−46 nm using the normalised cross correlation method.

Název v anglickém jazyce

The EBSD spatial resolution of a Timepix-based detector in a tilt-free geometry

Popis výsledku anglicky

Performing EBSD with a horizontal sample and a parallel EBSD detector sensor, enables safer specimen movements for data collection of large specimen areas and improves the longitudinal spatial resolution. The collection of electron backscattering patterns (EBSPs) at normal incidence to the electron beam has been revisited via the use of a direct electron detection (DED) sensor. In this article we present a fully operational DED EBSD detection system in this geometry, referred to as the tilt-free geometry. A well-defined Σ=3[101]{121} twin boundary in a Molybdenum bicrystal was used to measure the physical spatial resolution of the EBSD detector in this tilt-free geometry. In this study, two separate methods for estimating the spatial resolution of EBSD, one based on a pattern quality metric and the other on a normalised cross correlation coefficient were used. The spatial resolution was determined at accelerating voltages of 8 kV, 10 kV, 12 kV, 15 kV and 20 kV ranging from ~22−38 nm using the pattern quality method and ~31−46 nm using the normalised cross correlation method.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20501 - Materials engineering

Projekt

<a href="/cs/project/LQ1601" target="_blank" >LQ1601: CEITEC 2020</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Ultramicroscopy

ISSN

0304-3991

e-ISSN

1879-2723

Svazek periodika

226

Číslo periodika v rámci svazku

JUL

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

9

Strana od-do

113294

Kód UT WoS článku

000661167900004

EID výsledku v databázi Scopus

2-s2.0-85105592949