Means of Pressure Analysis using Nitride Silicon Diaphragm.

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Means of Pressure Analysis using Nitride Silicon Diaphragm.

Popis výsledku v původním jazyce

This paper presents results obtained by measuring nitride diaphragm deflection in several cross sections by means of Talystep scanning profiler and by a new designed optical diffractive method. Mentioned methods were applied for analyses of diaphragms fabricated using LPCVD Si.sub.3./sub.N.sub.4./sub. layers with 150 nm thick layer deposited on silicon substrate with crystallographic orientation (100), As a result there are space models of distortion of the whole diaphragm surface caused by known pressure acting to the diaphragm. Those models are exploited to optimize design of pressure sensor and modelling and simulation of its properties.

Název v anglickém jazyce

Means of Pressure Analysis using Nitride Silicon Diaphragm.

Popis výsledku anglicky

This paper presents results obtained by measuring nitride diaphragm deflection in several cross sections by means of Talystep scanning profiler and by a new designed optical diffractive method. Mentioned methods were applied for analyses of diaphragms fabricated using LPCVD Si.sub.3./sub.N.sub.4./sub. layers with 150 nm thick layer deposited on silicon substrate with crystallographic orientation (100), As a result there are space models of distortion of the whole diaphragm surface caused by known pressure acting to the diaphragm. Those models are exploited to optimize design of pressure sensor and modelling and simulation of its properties.

Druh

C - Kapitola v odborné knize

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2001

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název knihy nebo sborníku

Advances in Systems Science: Measurement, Circuits and Control.

ISBN

960-8052-39-4

Počet stran výsledku

4

Strana od-do

70-73

Počet stran knihy

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Název nakladatele

WSES Press

Místo vydání

Piraeus

Kód UT WoS kapitoly

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