Computer Controlled Low Energy SEM.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F03%3A12030023" target="_blank" >RIV/68081731:_____/03:12030023 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Computer Controlled Low Energy SEM.

Popis výsledku v původním jazyce

In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualisation of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. While energy around 1 keV is available in SEM of conventional design, extension down to about 200 eV is possible by using a compound objective lens with a retarding field element and very low energies require applyingthe retarding field directly to the specimen surface in so-called cathode lens [1 to 4]. The cathode lens can be inserted to below the standard objective lens of SEM [3] and most efficient is to use a coaxially positioned single-crystal scintillator discwith small central hole, serving as the anode and detector simultaneously [5]. In this configuration, an arbitrary low impact energy of primary electrons is adjusted by high negative biasing of the specimen.

Název v anglickém jazyce

Computer Controlled Low Energy SEM.

Popis výsledku anglicky

In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualisation of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. While energy around 1 keV is available in SEM of conventional design, extension down to about 200 eV is possible by using a compound objective lens with a retarding field element and very low energies require applyingthe retarding field directly to the specimen surface in so-called cathode lens [1 to 4]. The cathode lens can be inserted to below the standard objective lens of SEM [3] and most efficient is to use a coaxially positioned single-crystal scintillator discwith small central hole, serving as the anode and detector simultaneously [5]. In this configuration, an arbitrary low impact energy of primary electrons is adjusted by high negative biasing of the specimen.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

<a href="/cs/project/IBS2065017" target="_blank" >IBS2065017: Rastrovací elektronová mikroskopie nevodivých vzorků</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2003

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Microscopy and Microanalysis

ISSN

1431-9276

e-ISSN

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Svazek periodika

9

Číslo periodika v rámci svazku

Sup. 3

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

2

Strana od-do

116-117

Kód UT WoS článku

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EID výsledku v databázi Scopus

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