Nanometrology interferometric coordinates measurement system for local probe microscopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F13%3A00398396" target="_blank" >RIV/68081731:_____/13:00398396 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00177016:_____/13:#0001046

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2035477" target="_blank" >http://dx.doi.org/10.1117/12.2035477</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2035477" target="_blank" >10.1117/12.2035477</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Nanometrology interferometric coordinates measurement system for local probe microscopy

Popis výsledku v původním jazyce

We present an overview of approaches to the design of nanometrology measuring setups with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a positioning system with interferometricmultiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the microand nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the

Název v anglickém jazyce

Nanometrology interferometric coordinates measurement system for local probe microscopy

Popis výsledku anglicky

We present an overview of approaches to the design of nanometrology measuring setups with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a positioning system with interferometricmultiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the microand nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the

Druh

D - Stať ve sborníku

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Sixth International Symposium on Precision Mechanical Measurements (Proceedings of SPIE 8916)

ISBN

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ISSN

0277-786X

e-ISSN

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Počet stran výsledku

7

Strana od-do

"89160C: 1"-"7"

Název nakladatele

SPIE

Místo vydání

Bellingham

Místo konání akce

Guiyang

Datum konání akce

8. 8. 2013

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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