Exploitation of Contrasts in Low Energy SEM to Reveal True Microstructure

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F14%3A00436805" target="_blank" >RIV/68081731:_____/14:00436805 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1017/S1431927614006011" target="_blank" >http://dx.doi.org/10.1017/S1431927614006011</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1017/S1431927614006011" target="_blank" >10.1017/S1431927614006011</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Exploitation of Contrasts in Low Energy SEM to Reveal True Microstructure

Popis výsledku v původním jazyce

We have developed a Scanning Low Energy Electron Microscope (SLEEM) based on the Cathode Lens (CL) principle. A resolution of 4.5 nm at 20 eV, 0.8 nm at 200 eV and 0.5 nm at 15 keV primary beam energy can nowadays be obtained in a commercially availableinstrument. One of the main advantages of operation at low energies is the decrease in the interaction volume from approximately 1 ??? at 10 keV to 10 nm at 100 eV. The material contrast can be optimised and the charging effect suppressed at a tailored electron energy. Wave-optical contrasts are also available beneath 50 eV. The specimen may be immersed in a strong magnetic field in addition to an electrostatic field in order to obtain a small spot size across the whole energy range. The same fields influence the signal trajectories, so we can choose which part of the angular and energy distributions of emitted electrons are to be collected. Certain arrangements provide strong crystallographic contrast. Imaging conditions have been tail

Název v anglickém jazyce

Exploitation of Contrasts in Low Energy SEM to Reveal True Microstructure

Popis výsledku anglicky

We have developed a Scanning Low Energy Electron Microscope (SLEEM) based on the Cathode Lens (CL) principle. A resolution of 4.5 nm at 20 eV, 0.8 nm at 200 eV and 0.5 nm at 15 keV primary beam energy can nowadays be obtained in a commercially availableinstrument. One of the main advantages of operation at low energies is the decrease in the interaction volume from approximately 1 ??? at 10 keV to 10 nm at 100 eV. The material contrast can be optimised and the charging effect suppressed at a tailored electron energy. Wave-optical contrasts are also available beneath 50 eV. The specimen may be immersed in a strong magnetic field in addition to an electrostatic field in order to obtain a small spot size across the whole energy range. The same fields influence the signal trajectories, so we can choose which part of the angular and energy distributions of emitted electrons are to be collected. Certain arrangements provide strong crystallographic contrast. Imaging conditions have been tail

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Microscopy and Microanalysis

ISSN

1431-9276

e-ISSN

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Svazek periodika

20

Číslo periodika v rámci svazku

S3

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

2

Strana od-do

858-859

Kód UT WoS článku

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EID výsledku v databázi Scopus

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