In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00508751" target="_blank" >RIV/68081731:_____/19:00508751 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.mdpi.com/1996-1944/12/14/2307/htm" target="_blank" >https://www.mdpi.com/1996-1944/12/14/2307/htm</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/ma12142307" target="_blank" >10.3390/ma12142307</a>

Jazyk výsledku

angličtina

Název v původním jazyce

In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

Popis výsledku v původním jazyce

Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to show that a through-the-lens detector in a commercial electron microscope Magellan 400 FEG can, under specific conditions, work as an energy band-pass filter of secondary electrons that are excited by the primary beam electrons. The band-pass filter properties verify extensive simulations of secondary and backscattered electrons in a precision 3D model of a microscope. A unique test sample demonstrates the effects of the band-pass filter on final image and contrast with chromium and silver stripes on a silicon substrate, manufactured by a combination of e-beam lithography, wet etching, and lift-off technique. The ray tracing of signal electrons in a detector model predicate that the through-the-lens detector works as a band-pass filter of the secondary electrons with an energy window of about 3 eV. By moving the energy window along the secondary electron energy spectrum curve of the analyzed material, we select the energy of the secondary electrons to be detected. Energy filtration brings a change in contrast in the image as well as displaying details that are not otherwise visible.

Název v anglickém jazyce

In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

Popis výsledku anglicky

Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to show that a through-the-lens detector in a commercial electron microscope Magellan 400 FEG can, under specific conditions, work as an energy band-pass filter of secondary electrons that are excited by the primary beam electrons. The band-pass filter properties verify extensive simulations of secondary and backscattered electrons in a precision 3D model of a microscope. A unique test sample demonstrates the effects of the band-pass filter on final image and contrast with chromium and silver stripes on a silicon substrate, manufactured by a combination of e-beam lithography, wet etching, and lift-off technique. The ray tracing of signal electrons in a detector model predicate that the through-the-lens detector works as a band-pass filter of the secondary electrons with an energy window of about 3 eV. By moving the energy window along the secondary electron energy spectrum curve of the analyzed material, we select the energy of the secondary electrons to be detected. Energy filtration brings a change in contrast in the image as well as displaying details that are not otherwise visible.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Materials

ISSN

1996-1944

e-ISSN

—

Svazek periodika

12

Číslo periodika v rámci svazku

14

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

13

Strana od-do

2307

Kód UT WoS článku

000480454300095

EID výsledku v databázi Scopus

2-s2.0-85070449469