Bandpass filter for secondary electrons in SEM - simulations

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Bandpass filter for secondary electrons in SEM - simulations

Popis výsledku v původním jazyce

Scanning electron microscope (SEM) is commonly equipped with a through-the-lens secondary electron detector (TLD). The TLD detector in Magellan 400 FEG SEM works as a bandpass filter for the special setup of potentials of electrodes inside the objective lens, the positive potential on the specimen regulates the energy window of the filter. An energy filtered image contains additional information to that of an unfiltered one. The contrast of the filtered image is changed and new information about the topography and the material can be observed.nTo understand image contrast formation with TLD detector we traced SEs and BSEs through the three-dimensional (3D) model of included 3D distribution of the electrostatic and magnetic fields. The properties of the bandpass filter were simulated for a working distance (WD) in the range of 1 mm to 3 mm and a primary beam energy (EP) from 1 keV to 10 keV.nThe 3D electrostatic field of the system was calculated by Simion, magnetic field and raytracing were done using EOD program.

Název v anglickém jazyce

Bandpass filter for secondary electrons in SEM - simulations

Popis výsledku anglicky

Scanning electron microscope (SEM) is commonly equipped with a through-the-lens secondary electron detector (TLD). The TLD detector in Magellan 400 FEG SEM works as a bandpass filter for the special setup of potentials of electrodes inside the objective lens, the positive potential on the specimen regulates the energy window of the filter. An energy filtered image contains additional information to that of an unfiltered one. The contrast of the filtered image is changed and new information about the topography and the material can be observed.nTo understand image contrast formation with TLD detector we traced SEs and BSEs through the three-dimensional (3D) model of included 3D distribution of the electrostatic and magnetic fields. The properties of the bandpass filter were simulated for a working distance (WD) in the range of 1 mm to 3 mm and a primary beam energy (EP) from 1 keV to 10 keV.nThe 3D electrostatic field of the system was calculated by Simion, magnetic field and raytracing were done using EOD program.

Druh

D - Stať ve sborníku

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

ISBN

978-80-87441-17-6

ISSN

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e-ISSN

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Počet stran výsledku

2

Strana od-do

28-29

Název nakladatele

Institute of Scientific Instruments CAS

Místo vydání

Brno

Místo konání akce

Skalský dvůr

Datum konání akce

29. 5. 2016

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000391254000012