Statistical Coulomb interactions in multi-beam SEM

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F19%3A00524976" target="_blank" >RIV/68081731:_____/19:00524976 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.worldscientific.com/doi/10.1142/S0217751X19420211" target="_blank" >https://www.worldscientific.com/doi/10.1142/S0217751X19420211</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1142/S0217751X19420211" target="_blank" >10.1142/S0217751X19420211</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Statistical Coulomb interactions in multi-beam SEM

Popis výsledku v původním jazyce

Statistical Coulomb interactions in conventional scanning electron microscopy mostly affect the probe size via energy spread and virtual source broadening in the emitter vicinity. However, in a multi-beam probe forming system such as a multi-beam scanning electron microscopes (MBSEM), the trajectory displacement due to interactions in the whole column can give a contribution to the final probe size. For single-beam systems, this can be expressed using approximate formulae for the total trajectory displacement in a beam segment (Jansen's theory) or by integrating contributions of infinitesimally thin beam slices (the slice method). We build on Jansen's theory of statistical Coulomb interactions and develop formulae for the trajectory displacement in a multi-beam system. We also develop a more precise semi-analytical result using the slice method. We compare both approaches with a Monte Carlo simulation and show a good agreement with the results of the slice method. Finally, we discuss the implications of our results for the optical design of multi-beam SEM. In a multi-beam with probe size dominated by Coulomb interactions, an increase in the number of beamlets does not necessarily provide an increase of throughput, because the probe size is limited by the total current. Furthermore, we disprove the notion of the fewer the crossovers the less the Coulomb interactions by showing the quadratic dependence of trajectory displacement on segment length.

Název v anglickém jazyce

Statistical Coulomb interactions in multi-beam SEM

Popis výsledku anglicky

Statistical Coulomb interactions in conventional scanning electron microscopy mostly affect the probe size via energy spread and virtual source broadening in the emitter vicinity. However, in a multi-beam probe forming system such as a multi-beam scanning electron microscopes (MBSEM), the trajectory displacement due to interactions in the whole column can give a contribution to the final probe size. For single-beam systems, this can be expressed using approximate formulae for the total trajectory displacement in a beam segment (Jansen's theory) or by integrating contributions of infinitesimally thin beam slices (the slice method). We build on Jansen's theory of statistical Coulomb interactions and develop formulae for the trajectory displacement in a multi-beam system. We also develop a more precise semi-analytical result using the slice method. We compare both approaches with a Monte Carlo simulation and show a good agreement with the results of the slice method. Finally, we discuss the implications of our results for the optical design of multi-beam SEM. In a multi-beam with probe size dominated by Coulomb interactions, an increase in the number of beamlets does not necessarily provide an increase of throughput, because the probe size is limited by the total current. Furthermore, we disprove the notion of the fewer the crossovers the less the Coulomb interactions by showing the quadratic dependence of trajectory displacement on segment length.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

International Journal of Modern Physics. A

ISSN

0217-751X

e-ISSN

—

Svazek periodika

34

Číslo periodika v rámci svazku

36

Stát vydavatele periodika

SG - Singapurská republika

Počet stran výsledku

11

Strana od-do

1942021

Kód UT WoS článku

000516718800022

EID výsledku v databázi Scopus

2-s2.0-85076546405