Surface Morphology and Ablation Efficiency in UV Ultrafast Laser Micromachining of Fused Silica

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F25%3A00643242" target="_blank" >RIV/68081731:_____/25:00643242 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216305:26210/26:0199441

Výsledek na webu

<a href="https://journalmt.com/artkey/mft-202504-0012_surface-morphology-and-ablation-efficiency-in-duv-ultrafast-laser-micromachining-of-fused-silica.php" target="_blank" >https://journalmt.com/artkey/mft-202504-0012_surface-morphology-and-ablation-efficiency-in-duv-ultrafast-laser-micromachining-of-fused-silica.php</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.21062/mft.2025.057" target="_blank" >10.21062/mft.2025.057</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Surface Morphology and Ablation Efficiency in UV Ultrafast Laser Micromachining of Fused Silica

Popis výsledku v původním jazyce

Fused silica is a key material for high-precision applications such as micro-optics and microfluidics. One route to improving direct laser writing (DLW) of fused silica is the use of shorter laser wavelengths, which enable tighter focusing and enhanced absorption. In this study, the influence of process parameters on surface quality and material removal during DLW using a deep ultraviolet (DUV) ultrafast laser (257 nm, 1 ps) was investigated. A full-factorial design of the experiment was used to identify conditions that optimise both surface quality and ablation efficiency. Surface roughness as low as S-a approximate to 200 nm and material removal rates up to 0.048 mm(3).min(-1) were achieved. Conditions that led to surface degradation were also identified. Finally, the optimised parameters were applied to fabricate a microfluidic demonstrator. These results confirm that DUV ultrafast DLW is a powerful technique for fabricating high-fidelity features in fused silica with exceptional precision and quality that can be used for micro-optics or microfluidics devices.

Název v anglickém jazyce

Surface Morphology and Ablation Efficiency in UV Ultrafast Laser Micromachining of Fused Silica

Popis výsledku anglicky

Fused silica is a key material for high-precision applications such as micro-optics and microfluidics. One route to improving direct laser writing (DLW) of fused silica is the use of shorter laser wavelengths, which enable tighter focusing and enhanced absorption. In this study, the influence of process parameters on surface quality and material removal during DLW using a deep ultraviolet (DUV) ultrafast laser (257 nm, 1 ps) was investigated. A full-factorial design of the experiment was used to identify conditions that optimise both surface quality and ablation efficiency. Surface roughness as low as S-a approximate to 200 nm and material removal rates up to 0.048 mm(3).min(-1) were achieved. Conditions that led to surface degradation were also identified. Finally, the optimised parameters were applied to fabricate a microfluidic demonstrator. These results confirm that DUV ultrafast DLW is a powerful technique for fabricating high-fidelity features in fused silica with exceptional precision and quality that can be used for micro-optics or microfluidics devices.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

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OECD FORD obor

20301 - Mechanical engineering

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Manufacturing Technology

ISSN

1213-2489

e-ISSN

2787-9402

Svazek periodika

25

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

10

Strana od-do

521-530

Kód UT WoS článku

001605607700010

EID výsledku v databázi Scopus

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