Exchangeable scanning probe microscopy optical fiber tips

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F25%3A00648680" target="_blank" >RIV/68081731:_____/25:00648680 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216305:26210/26:0200128

Výsledek na webu

<a href="https://www.spiedigitallibrary.org/conference-proceedings-of-spie/13639/3060346/Exchangeable-scanning-probe-microscopy-optical-fiber-tips/10.1117/12.3060346.short" target="_blank" >https://www.spiedigitallibrary.org/conference-proceedings-of-spie/13639/3060346/Exchangeable-scanning-probe-microscopy-optical-fiber-tips/10.1117/12.3060346.short</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.3060346" target="_blank" >10.1117/12.3060346</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Exchangeable scanning probe microscopy optical fiber tips

Popis výsledku v původním jazyce

Correlative probe, electron, and near-field cathodoluminescence (CL) microscopy in scanning electron microscope (SEM) enables comprehensive sample characterization and chemical analysis, which are crucial for advancing novel material and nanotechnology research. In this technique, scanning near-field optical microscopy (SNOM) probe scans the sample simultaneously with the electron beam, enabling the acquisition of correlated images. However, the system's added complexity and the fragility of the implemented SNOM tip have yet limited the widespread adoption of this powerful technique combination. Here, we present a newly developed self-sensing quartz-based probe for the AFM-in-SEM solution LiteScopeT. This probe features an optical fiber with an exchangeable tip designed to address the tip fragility. This innovative probe-tip system allows seamless in situ SEM replacement of only the fragile tip at the optical fiber's end, without venting the vacuum chamber and replacing the entire probe. These exchangeable tips are fabricated in a stack on a silicon wafer using two-photon polymerization (TPP) and subsequently undergo post-process plasma etching to achieve an apex of elliptical cross-section with a semi-minor axis of 24 nm. Proof-of-concept CL and topography measurements are presented. The described socket for mounting the SNOM tip on the optical fiber is readily applicable to accommodate various other TPP 3D printable optical fiber terminations, such as micro-optical and mechanical elements, and sensors. The presented solution not only streamlines the workflow of the correlative probe, electron, and near-field CL microscopy but also broadens the applicability of optical fiber functionalization for diverse experimental setups.

Název v anglickém jazyce

Exchangeable scanning probe microscopy optical fiber tips

Popis výsledku anglicky

Correlative probe, electron, and near-field cathodoluminescence (CL) microscopy in scanning electron microscope (SEM) enables comprehensive sample characterization and chemical analysis, which are crucial for advancing novel material and nanotechnology research. In this technique, scanning near-field optical microscopy (SNOM) probe scans the sample simultaneously with the electron beam, enabling the acquisition of correlated images. However, the system's added complexity and the fragility of the implemented SNOM tip have yet limited the widespread adoption of this powerful technique combination. Here, we present a newly developed self-sensing quartz-based probe for the AFM-in-SEM solution LiteScopeT. This probe features an optical fiber with an exchangeable tip designed to address the tip fragility. This innovative probe-tip system allows seamless in situ SEM replacement of only the fragile tip at the optical fiber's end, without venting the vacuum chamber and replacing the entire probe. These exchangeable tips are fabricated in a stack on a silicon wafer using two-photon polymerization (TPP) and subsequently undergo post-process plasma etching to achieve an apex of elliptical cross-section with a semi-minor axis of 24 nm. Proof-of-concept CL and topography measurements are presented. The described socket for mounting the SNOM tip on the optical fiber is readily applicable to accommodate various other TPP 3D printable optical fiber terminations, such as micro-optical and mechanical elements, and sensors. The presented solution not only streamlines the workflow of the correlative probe, electron, and near-field CL microscopy but also broadens the applicability of optical fiber functionalization for diverse experimental setups.

Druh

D - Stať ve sborníku

CEP obor

—

OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

29th International Conference on Optical Fiber Sensors

ISBN

978-1-5106-9187-2

ISSN

0277-786X

e-ISSN

1996-756X

Počet stran výsledku

4

Strana od-do

136394Z

Název nakladatele

SPIE

Místo vydání

Bellingham

Místo konání akce

Porto

Datum konání akce

25. 5. 2025

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

001517368300160