Low pressure plasma-jet systems and their application for deposition of ceramic thin films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F07%3A00097890" target="_blank" >RIV/68378271:_____/07:00097890 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Low pressure plasma-jet systems and their application for deposition of ceramic thin films

Popis výsledku v původním jazyce

We applied the single and the double hollow cathode plasma jet systems for deposition of BaxSr1-xTiO3 (BSTO) thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Two ceramic inserts in a single nozzle or two separate nozzles made of BaTiO3 andSrTiO3 ceramics were reactively sputtered in the RF modulated plasma jet. Plasma parameters were determined by time-resolved measurements. Electron density and electron effective temperature at the substrate position were determined by Langmuir probe technique, temperature of neutral particles and ratio of sputtered atoms were estimated by optical emission spectroscopy. Measured electron concentration reached value 2x1016 m-3 during the active part of the duty cycle and resulting effective electron temperature was approximately 5 eV. High correlation between ratio of spectral intensity of Ba and Sr lines and ratio of Ba and Sr atoms in BSTO thin film was observed. XRD diffraction confirmed presence of BSTO and STO perovskite phase.

Název v anglickém jazyce

Low pressure plasma-jet systems and their application for deposition of ceramic thin films

Popis výsledku anglicky

We applied the single and the double hollow cathode plasma jet systems for deposition of BaxSr1-xTiO3 (BSTO) thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Two ceramic inserts in a single nozzle or two separate nozzles made of BaTiO3 andSrTiO3 ceramics were reactively sputtered in the RF modulated plasma jet. Plasma parameters were determined by time-resolved measurements. Electron density and electron effective temperature at the substrate position were determined by Langmuir probe technique, temperature of neutral particles and ratio of sputtered atoms were estimated by optical emission spectroscopy. Measured electron concentration reached value 2x1016 m-3 during the active part of the duty cycle and resulting effective electron temperature was approximately 5 eV. High correlation between ratio of spectral intensity of Ba and Sr lines and ratio of Ba and Sr atoms in BSTO thin film was observed. XRD diffraction confirmed presence of BSTO and STO perovskite phase.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

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OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2007

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Optoelectronics and Advanced Materials

ISSN

1454-4164

e-ISSN

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Svazek periodika

9

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

RO - Rumunsko

Počet stran výsledku

6

Strana od-do

875-880

Kód UT WoS článku

000245834800017

EID výsledku v databázi Scopus

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