Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F06%3A00324065" target="_blank" >RIV/68378271:_____/06:00324065 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system

Popis výsledku v původním jazyce

Pulse modulated double hollow cathode plasma jet system was used for deposition of BaxSr1-xTiO3 (BSTO) thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Both separate nozzles made of BaTiO3 and SrTiO3 ceramics were reactively sputtered in the RF modulated plasma jet. Electron density, electron temperature and electron energy probability function were determined by Langmuir probe. Temperature of neutral particles and ratio of sputtered atoms (especially Ba and Sr) were estimated by opticalemission spectroscopy. High correlation between ratio of spectral intensity of Ba and Sr lines and ratio of Ba and Sr atoms in BSTO thin film was observed. Knowledge of this correlation was used for deposition of compositional gradient BSTO thin films.

Název v anglickém jazyce

Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system

Popis výsledku anglicky

Pulse modulated double hollow cathode plasma jet system was used for deposition of BaxSr1-xTiO3 (BSTO) thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Both separate nozzles made of BaTiO3 and SrTiO3 ceramics were reactively sputtered in the RF modulated plasma jet. Electron density, electron temperature and electron energy probability function were determined by Langmuir probe. Temperature of neutral particles and ratio of sputtered atoms (especially Ba and Sr) were estimated by opticalemission spectroscopy. High correlation between ratio of spectral intensity of Ba and Sr lines and ratio of Ba and Sr atoms in BSTO thin film was observed. Knowledge of this correlation was used for deposition of compositional gradient BSTO thin films.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

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OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2006

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Czechoslovak Journal of Physics

ISSN

0011-4626

e-ISSN

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Svazek periodika

56

Číslo periodika v rámci svazku

Suppl. B

Stát vydavatele periodika

CZ - Česká republika

Počet stran výsledku

7

Strana od-do

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Kód UT WoS článku

000241337100005

EID výsledku v databázi Scopus

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