Diamond-coated three-dimensional GaN micromembranes: effect of nucleation and deposition techniques

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00454749" target="_blank" >RIV/68378271:_____/15:00454749 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1002/pssb.201552227" target="_blank" >http://dx.doi.org/10.1002/pssb.201552227</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssb.201552227" target="_blank" >10.1002/pssb.201552227</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Diamond-coated three-dimensional GaN micromembranes: effect of nucleation and deposition techniques

Popis výsledku v původním jazyce

In this work, we present technological issues on deposition of diamond films as a backside heat spreader for GaN membranes. We compared three nucleation techniques including standard ultrasonic seeding by diamond powder (DP), drop off with DP in solutionand polymer based nucleation by PVA composite. The diamond growth was performed complementary by HFCVD or MWCVD. We found that standard nucleation techniques resulted in damaging of GaN membranes, or low nucleation efficiency in the Z-depth of the structures. Implementation of a novel nucleation method with PVA polymer composite led to coating of both bottom and top part of membrane including side walls. The coverage homogeneity was evaluated by scanning electron microscopy and Raman spectroscopy. Theobtained results indicate that the efficiency (and/or nucleation density) of the polymer-based technique is comparable with standard ultrasonic seeding and could be used preferable for nucleation of soft and fragile substrates.

Název v anglickém jazyce

Diamond-coated three-dimensional GaN micromembranes: effect of nucleation and deposition techniques

Popis výsledku anglicky

In this work, we present technological issues on deposition of diamond films as a backside heat spreader for GaN membranes. We compared three nucleation techniques including standard ultrasonic seeding by diamond powder (DP), drop off with DP in solutionand polymer based nucleation by PVA composite. The diamond growth was performed complementary by HFCVD or MWCVD. We found that standard nucleation techniques resulted in damaging of GaN membranes, or low nucleation efficiency in the Z-depth of the structures. Implementation of a novel nucleation method with PVA polymer composite led to coating of both bottom and top part of membrane including side walls. The coverage homogeneity was evaluated by scanning electron microscopy and Raman spectroscopy. Theobtained results indicate that the efficiency (and/or nucleation density) of the polymer-based technique is comparable with standard ultrasonic seeding and could be used preferable for nucleation of soft and fragile substrates.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/GP14-16549P" target="_blank" >GP14-16549P: Ladění elektrických vlastností hybridních struktur diamantu a galium nitridu řízenou optimalizací vnitřních pnutí</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Physica Status Solidi B-Basic Solid State Physics

ISSN

0370-1972

e-ISSN

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Svazek periodika

252

Číslo periodika v rámci svazku

11

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

6

Strana od-do

2585-2590

Kód UT WoS článku

000364690400039

EID výsledku v databázi Scopus

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