Challenges and technological aspects of boron incorporation into AlGaN and AlN layers prepared by MOVPE

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F17%3A00479307" target="_blank" >RIV/68378271:_____/17:00479307 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Challenges and technological aspects of boron incorporation into AlGaN and AlN layers prepared by MOVPE

Popis výsledku v původním jazyce

AlGaN/AlN quantum well heterostructures are very promising for UV C LEDs, emitting at 270 nm. Possible applications are sterilization of water, air, or different medical equipment, different kinds of detectors used in biomedicine, optical data storage, etc. It is difficult to prepare defect-poor structures due to the large lattice mismatch of AlGaN and AlN. Possible solution is an introduction of boron to AlGaN to reduce lattice mismatch and manage strain. For AlBN with TEB pulsed, the hill formation starts for thicker layers, the density and height of the hills are lower. Also for AlBGaN, the structure quality was better for TEB pulsed source for thicker layers of 20 nm, the tips of columns are already visible by AFM.n

Název v anglickém jazyce

Challenges and technological aspects of boron incorporation into AlGaN and AlN layers prepared by MOVPE

Popis výsledku anglicky

AlGaN/AlN quantum well heterostructures are very promising for UV C LEDs, emitting at 270 nm. Possible applications are sterilization of water, air, or different medical equipment, different kinds of detectors used in biomedicine, optical data storage, etc. It is difficult to prepare defect-poor structures due to the large lattice mismatch of AlGaN and AlN. Possible solution is an introduction of boron to AlGaN to reduce lattice mismatch and manage strain. For AlBN with TEB pulsed, the hill formation starts for thicker layers, the density and height of the hills are lower. Also for AlBGaN, the structure quality was better for TEB pulsed source for thicker layers of 20 nm, the tips of columns are already visible by AFM.n

Druh

O - Ostatní výsledky

CEP obor

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OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

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Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů