Optical, structural and mechanical properties of TiO2 and TiO2-ZrO2 thin films deposited on glass using magnetron sputtering

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F23%3A00574615" target="_blank" >RIV/68378271:_____/23:00574615 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61989592:15310/23:73620078

Výsledek na webu

<a href="https://doi.org/10.1016/j.mtcomm.2023.106334" target="_blank" >https://doi.org/10.1016/j.mtcomm.2023.106334</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.mtcomm.2023.106334" target="_blank" >10.1016/j.mtcomm.2023.106334</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical, structural and mechanical properties of TiO2 and TiO2-ZrO2 thin films deposited on glass using magnetron sputtering

Popis výsledku v původním jazyce

In this study, the structural, optical, and mechanical properties of magnetron sputtered TiO2 and TiO2-ZrO2 mixture transparent thin films along with the effect of heat treatment were investigated. TiO2 and TiO2-ZrO2 thin films were fabricated by magnetron sputtering from ceramic targets at room temperature on both the soda-lime and the borosilicate glass substrates. Structural properties of thin films were studied via X-ray photoelectron spectroscopy (XPS), grazing incidence X-ray diffractometry (GI-XRD) and scanning electron microscopy (SEM). Optical characterizations were carried out using spectrophotometry and spectroscopic ellipsometry. The hard-ness and scratch behavior of the samples were investigated using nano-indentation and nano-scratch tests. TiO2 and ZrO2 presence in films was confirmed by XRD and XPS analysis. It was found that TiO2-ZrO2 films show higher hardness values compared to TiO2 thin films.

Název v anglickém jazyce

Optical, structural and mechanical properties of TiO2 and TiO2-ZrO2 thin films deposited on glass using magnetron sputtering

Popis výsledku anglicky

In this study, the structural, optical, and mechanical properties of magnetron sputtered TiO2 and TiO2-ZrO2 mixture transparent thin films along with the effect of heat treatment were investigated. TiO2 and TiO2-ZrO2 thin films were fabricated by magnetron sputtering from ceramic targets at room temperature on both the soda-lime and the borosilicate glass substrates. Structural properties of thin films were studied via X-ray photoelectron spectroscopy (XPS), grazing incidence X-ray diffractometry (GI-XRD) and scanning electron microscopy (SEM). Optical characterizations were carried out using spectrophotometry and spectroscopic ellipsometry. The hard-ness and scratch behavior of the samples were investigated using nano-indentation and nano-scratch tests. TiO2 and ZrO2 presence in films was confirmed by XRD and XPS analysis. It was found that TiO2-ZrO2 films show higher hardness values compared to TiO2 thin films.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20501 - Materials engineering

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Materials Today Communications

ISSN

2352-4928

e-ISSN

2352-4928

Svazek periodika

35

Číslo periodika v rámci svazku

June

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

9

Strana od-do

106334

Kód UT WoS článku

001042411400001

EID výsledku v databázi Scopus

2-s2.0-85160544087