Influence of the magnetic field on the extension of the ionization region in high power impulse magnetron sputtering discharges

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F23%3A00574651" target="_blank" >RIV/68378271:_____/23:00574651 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1088/1361-6595/ace847" target="_blank" >https://doi.org/10.1088/1361-6595/ace847</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6595/ace847" target="_blank" >10.1088/1361-6595/ace847</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Influence of the magnetic field on the extension of the ionization region in high power impulse magnetron sputtering discharges

Popis výsledku v původním jazyce

The high power impulse magnetron sputtering (HiPIMS) discharge brings about increased ionization of the sputtered atoms due to an increased electron density and efficient electron energization during the active period of the pulse. The ionization is effective mainly within the electron trapping zone, an ionization region (IR), defined by the magnet configuration. Here, the average extension and the volume of the IR are determined based on measuring the optical emission from an excited level of the argon working gas atoms. For particular HiPIMS conditions, argon species ionization and excitation processes are assumed to be proportional. Hence, the light emission from certain excited atoms is assumed to reflect the IR extension. The light emission was recorded above a 100 mm diameter titanium target through a 763 nm bandpass filter using a gated camera.

Název v anglickém jazyce

Influence of the magnetic field on the extension of the ionization region in high power impulse magnetron sputtering discharges

Popis výsledku anglicky

The high power impulse magnetron sputtering (HiPIMS) discharge brings about increased ionization of the sputtered atoms due to an increased electron density and efficient electron energization during the active period of the pulse. The ionization is effective mainly within the electron trapping zone, an ionization region (IR), defined by the magnet configuration. Here, the average extension and the volume of the IR are determined based on measuring the optical emission from an excited level of the argon working gas atoms. For particular HiPIMS conditions, argon species ionization and excitation processes are assumed to be proportional. Hence, the light emission from certain excited atoms is assumed to reflect the IR extension. The light emission was recorded above a 100 mm diameter titanium target through a 763 nm bandpass filter using a gated camera.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Plasma Sources Science & Technology

ISSN

0963-0252

e-ISSN

1361-6595

Svazek periodika

32

Číslo periodika v rámci svazku

7

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

10

Strana od-do

075016

Kód UT WoS článku

001038727700001

EID výsledku v databázi Scopus

2-s2.0-85166488477