Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00391436" target="_blank" >RIV/68378271:_____/13:00391436 - isvavai.cz</a>

Výsledek na webu

<a href="http://iopscience.iop.org/0963-0252/22/1/015002/" target="_blank" >http://iopscience.iop.org/0963-0252/22/1/015002/</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0963-0252/22/1/015002" target="_blank" >10.1088/0963-0252/22/1/015002</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges

Popis výsledku v původním jazyce

Time-resolved investigations of excited argon atom density and temperature and ground-state titanium atom density during high-power impulse magnetron sputtering (HiPIMS, repetition frequency 100 Hz) and direct current pulsed magnetron (repetition frequency 2.5 kHz) discharges (PMDs) in argon employing a titanium target were performed. Atom density and temperature were measured with the help of tunable diode laser absorption spectroscopy. Excited argon atoms form during the discharge pulse and again by three-body electron ion recombination in the afterglow. Similarly, the temperature of excited (metastable) argon atoms rises during the plasma on phase and again during the afterglow. The observed temporal evolution of the temperature is faster than expected from thermal conductivity considerations. The time dependence of titanium atoms can be explained by recombination and diffusion.

Název v anglickém jazyce

Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges

Popis výsledku anglicky

Time-resolved investigations of excited argon atom density and temperature and ground-state titanium atom density during high-power impulse magnetron sputtering (HiPIMS, repetition frequency 100 Hz) and direct current pulsed magnetron (repetition frequency 2.5 kHz) discharges (PMDs) in argon employing a titanium target were performed. Atom density and temperature were measured with the help of tunable diode laser absorption spectroscopy. Excited argon atoms form during the discharge pulse and again by three-body electron ion recombination in the afterglow. Similarly, the temperature of excited (metastable) argon atoms rises during the plasma on phase and again during the afterglow. The observed temporal evolution of the temperature is faster than expected from thermal conductivity considerations. The time dependence of titanium atoms can be explained by recombination and diffusion.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Plasma Sources Science & Technology

ISSN

0963-0252

e-ISSN

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Svazek periodika

22

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

10

Strana od-do

1-10

Kód UT WoS článku

000314966300007

EID výsledku v databázi Scopus

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