Modeling and fabrication of single cantilever piezoelectric microgenerator with optimised ZnO active layer

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F15%3A00230012" target="_blank" >RIV/68407700:21230/15:00230012 - isvavai.cz</a>

Výsledek na webu

<a href="http://www.sciencedirect.com/science/article/pii/S0040609015005878" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0040609015005878</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2015.05.053" target="_blank" >10.1016/j.tsf.2015.05.053</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Modeling and fabrication of single cantilever piezoelectric microgenerator with optimised ZnO active layer

Popis výsledku v původním jazyce

This paper presents design and fabrication process details of a piezoelectric generator with a thin film Zinc Oxide (ZnO) layer. Structure of the piezoelectrical cantilever beam harvester consists of ZnO layer in between two insulating Al2O3 layers and outer aluminium contacts deposited on a silicon substrate. This multilayer system was prepared by the combination of radio - frequency and direct - current magnetron sputtering. Geometrical arrangement of the substrate holder and deposition target was optimized in order to reduce the disruptive effect of the high energy ions bombardment on the ZnO film microstructure. We present ZnO microstructure characterizati on by means of X-ray diffraction and scanning electron microscopy related to the estimation of internal micro-strains, crystallite sizes and deposition rates. Maximum generated open-circuit voltage achieved close to the cantilever resonant frequency of 595 Hz was 0.975 V.

Název v anglickém jazyce

Modeling and fabrication of single cantilever piezoelectric microgenerator with optimised ZnO active layer

Popis výsledku anglicky

This paper presents design and fabrication process details of a piezoelectric generator with a thin film Zinc Oxide (ZnO) layer. Structure of the piezoelectrical cantilever beam harvester consists of ZnO layer in between two insulating Al2O3 layers and outer aluminium contacts deposited on a silicon substrate. This multilayer system was prepared by the combination of radio - frequency and direct - current magnetron sputtering. Geometrical arrangement of the substrate holder and deposition target was optimized in order to reduce the disruptive effect of the high energy ions bombardment on the ZnO film microstructure. We present ZnO microstructure characterizati on by means of X-ray diffraction and scanning electron microscopy related to the estimation of internal micro-strains, crystallite sizes and deposition rates. Maximum generated open-circuit voltage achieved close to the cantilever resonant frequency of 595 Hz was 0.975 V.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

—

Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Svazek periodika

591

Číslo periodika v rámci svazku

9

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

6

Strana od-do

305-310

Kód UT WoS článku

000362008000028

EID výsledku v databázi Scopus

2-s2.0-84942838059