The influence of nitrogen and oxygen additions on the thermal characteristics of aluminium-based thin filmsOriginal

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F15%3A00231616" target="_blank" >RIV/68407700:21230/15:00231616 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.matchemphys.2015.08.015" target="_blank" >http://dx.doi.org/10.1016/j.matchemphys.2015.08.015</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.matchemphys.2015.08.015" target="_blank" >10.1016/j.matchemphys.2015.08.015</a>

Jazyk výsledku

angličtina

Název v původním jazyce

The influence of nitrogen and oxygen additions on the thermal characteristics of aluminium-based thin filmsOriginal

Popis výsledku v původním jazyce

The ternary aluminium oxynitride (AlNxOy) system offers the possibility to obtain a wide range of properties by tailoring the ratio between pure Al, AlNx and AlOy and therefore opening a significant number of possible applications. In this work the thermal behaviour of AlNxOy thin films was analysed by modulated infrared radiometry (MIRR), taking as reference the binary AlOy and AlNx systems. MIRR is a non-contact and non-destructive thermal wave measurement technique based on the excitation, propagation and detection of temperature oscillations of very small amplitudes. The intended change of the partial pressure of the reactive gas (N2 and/or O2) influenced the target condition and hence the deposition characteristics which, altogether, affected thecomposition and microstructure of the films. Based on the MIRR measurements and their qualitative and quantitative interpretation, some correlations between the thermal transport properties of the films and their chemical/physical propert

Název v anglickém jazyce

The influence of nitrogen and oxygen additions on the thermal characteristics of aluminium-based thin filmsOriginal

Popis výsledku anglicky

The ternary aluminium oxynitride (AlNxOy) system offers the possibility to obtain a wide range of properties by tailoring the ratio between pure Al, AlNx and AlOy and therefore opening a significant number of possible applications. In this work the thermal behaviour of AlNxOy thin films was analysed by modulated infrared radiometry (MIRR), taking as reference the binary AlOy and AlNx systems. MIRR is a non-contact and non-destructive thermal wave measurement technique based on the excitation, propagation and detection of temperature oscillations of very small amplitudes. The intended change of the partial pressure of the reactive gas (N2 and/or O2) influenced the target condition and hence the deposition characteristics which, altogether, affected thecomposition and microstructure of the films. Based on the MIRR measurements and their qualitative and quantitative interpretation, some correlations between the thermal transport properties of the films and their chemical/physical propert

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JK - Koroze a povrchové úpravy materiálu

OECD FORD obor

—

Projekt

<a href="/cs/project/EE2.3.30.0034" target="_blank" >EE2.3.30.0034: Podpora zkvalitnění týmů výzkumu a vývoje a rozvoj intersektorální mobility na ČVUT v Praze</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Materials Chemistry and Physics

ISSN

0254-0584

e-ISSN

—

Svazek periodika

163

Číslo periodika v rámci svazku

August

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

12

Strana od-do

569-580

Kód UT WoS článku

000365361500068

EID výsledku v databázi Scopus

2-s2.0-84940460526