TiSiN(Ag) films deposited by HiPIMS working in DOMS mode: Effect of Ag content on structure, mechanical properties and thermal stability

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F19%3A00329505" target="_blank" >RIV/68407700:21230/19:00329505 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.apsusc.2019.01.174" target="_blank" >https://doi.org/10.1016/j.apsusc.2019.01.174</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.apsusc.2019.01.174" target="_blank" >10.1016/j.apsusc.2019.01.174</a>

Jazyk výsledku

angličtina

Název v původním jazyce

TiSiN(Ag) films deposited by HiPIMS working in DOMS mode: Effect of Ag content on structure, mechanical properties and thermal stability

Popis výsledku v původním jazyce

TiSiN(Ag) coatings with Ag contents ranging from 0 to 29 at.% were designed as promising materials to allow long term solid lubrication during dry machining operations. Here, we report the influence of Ag additions on the properties of TiSiN(Ag) films deposited by high power impulse magnetron sputtering- HiPIMS, working in deep oscillation magnetron sputtering mode – DOMS. Introduction of silver pellets on the target progressively increases the Ag concentration on the films, influencing the deposition rate, structure and morphology of the films. All the coatings display crystalline peaks assigned to a TiN fcc NaCl type structure. Ag additions to the reference TiSiN film, significantly broadens the TiN diffraction peaks and abruptly decreases the grain size of the TiN crystallites from 24 nm to 11–7 nm. Grain size was then found to be independent of the silver content on the films. Hardness and Young's modulus of the coatings decreased with increasing Ag additions mainly due to the increase of this soft phase on the microstructure. An increase in the peak power was observed when 6 at.% Ag was added which revealed a transition from a columnar to a very compact morphology, a decrease of the deposition rate and an increase of the lattice parameter for this coating. A reverse in the morphology is then perceived for the higher Ag concentration (29 at.%). Annealing treatment didn't present any significant changes in the structure/phase composition or mechanical properties of the coatings. Elemental maps and profiles allowed perceiving the formation of a very thin dual layer where a top Ag rich layer is formed due to the diffusion of silver from the Ag deficient TiSiN layer below.

Název v anglickém jazyce

TiSiN(Ag) films deposited by HiPIMS working in DOMS mode: Effect of Ag content on structure, mechanical properties and thermal stability

Popis výsledku anglicky

TiSiN(Ag) coatings with Ag contents ranging from 0 to 29 at.% were designed as promising materials to allow long term solid lubrication during dry machining operations. Here, we report the influence of Ag additions on the properties of TiSiN(Ag) films deposited by high power impulse magnetron sputtering- HiPIMS, working in deep oscillation magnetron sputtering mode – DOMS. Introduction of silver pellets on the target progressively increases the Ag concentration on the films, influencing the deposition rate, structure and morphology of the films. All the coatings display crystalline peaks assigned to a TiN fcc NaCl type structure. Ag additions to the reference TiSiN film, significantly broadens the TiN diffraction peaks and abruptly decreases the grain size of the TiN crystallites from 24 nm to 11–7 nm. Grain size was then found to be independent of the silver content on the films. Hardness and Young's modulus of the coatings decreased with increasing Ag additions mainly due to the increase of this soft phase on the microstructure. An increase in the peak power was observed when 6 at.% Ag was added which revealed a transition from a columnar to a very compact morphology, a decrease of the deposition rate and an increase of the lattice parameter for this coating. A reverse in the morphology is then perceived for the higher Ag concentration (29 at.%). Annealing treatment didn't present any significant changes in the structure/phase composition or mechanical properties of the coatings. Elemental maps and profiles allowed perceiving the formation of a very thin dual layer where a top Ag rich layer is formed due to the diffusion of silver from the Ag deficient TiSiN layer below.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Applied Surface Science

ISSN

0169-4332

e-ISSN

1873-5584

Svazek periodika

478

Číslo periodika v rámci svazku

June

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

9

Strana od-do

426-434

Kód UT WoS článku

000461150400052

EID výsledku v databázi Scopus

2-s2.0-85060957294