Oxidation behaviour of TiSiN(Ag) films deposited by high power impulse magnetron sputtering

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F19%3A00335889" target="_blank" >RIV/68407700:21230/19:00335889 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.tsf.2019.137423" target="_blank" >https://doi.org/10.1016/j.tsf.2019.137423</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.tsf.2019.137423" target="_blank" >10.1016/j.tsf.2019.137423</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Oxidation behaviour of TiSiN(Ag) films deposited by high power impulse magnetron sputtering

Popis výsledku v původním jazyce

TiSiN coatings alloyed with increasing silver content were deposited for designing a self-lubricant coating with controlled lubricant element diffusion. Here, we report the influence of the Ag content on the oxidation behaviour of TiSiN(Ag) films deposited by HiPIMS (High Power Impulse Magnetron Sputtering) working in DOMS (Deep Oscillation Magnetron Sputtering) mode. In-situ high-temperature oxidation X-ray diffractograms allowed to observe the first signs of oxidation occurring at about similar to 850 degrees C with the appearance of the rutile TiO2 peaks. Observation of even distribution of silver was still possible on the un-oxidized part of the films, suggesting that the films offer an efficient barrier to the Ag diffusion. Dynamic-mode thermogravimetry analysis showed that silver addition does not change the onset point of oxidation of the coatings. However, the oxidation rate deteriorated with the presence of Ag. An unusual mass loss could be observed for the coatings with 6 and 10 at.% of Ag, as a result of silver evaporation/sublimation process. Results from isothermal thermogravimetry performed at 900 degrees C show two distinct regimes and corroborate the detrimental effect of the Ag on the oxidation resistance of the coatings. Nonetheless, in the un-oxidized part of the films, the silver continued to be homogeneously distributed confirming again the efficient barrier against Ag diffusion.

Název v anglickém jazyce

Oxidation behaviour of TiSiN(Ag) films deposited by high power impulse magnetron sputtering

Popis výsledku anglicky

TiSiN coatings alloyed with increasing silver content were deposited for designing a self-lubricant coating with controlled lubricant element diffusion. Here, we report the influence of the Ag content on the oxidation behaviour of TiSiN(Ag) films deposited by HiPIMS (High Power Impulse Magnetron Sputtering) working in DOMS (Deep Oscillation Magnetron Sputtering) mode. In-situ high-temperature oxidation X-ray diffractograms allowed to observe the first signs of oxidation occurring at about similar to 850 degrees C with the appearance of the rutile TiO2 peaks. Observation of even distribution of silver was still possible on the un-oxidized part of the films, suggesting that the films offer an efficient barrier to the Ag diffusion. Dynamic-mode thermogravimetry analysis showed that silver addition does not change the onset point of oxidation of the coatings. However, the oxidation rate deteriorated with the presence of Ag. An unusual mass loss could be observed for the coatings with 6 and 10 at.% of Ag, as a result of silver evaporation/sublimation process. Results from isothermal thermogravimetry performed at 900 degrees C show two distinct regimes and corroborate the detrimental effect of the Ag on the oxidation resistance of the coatings. Nonetheless, in the un-oxidized part of the films, the silver continued to be homogeneously distributed confirming again the efficient barrier against Ag diffusion.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Thin Solid Films

ISSN

0040-6090

e-ISSN

—

Svazek periodika

688

Číslo periodika v rámci svazku

October

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

9

Strana od-do

—

Kód UT WoS článku

000485256500033

EID výsledku v databázi Scopus

2-s2.0-85069643551