Chemical vapor deposition of diamond fimls on QCM substrates

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F23%3A00366679" target="_blank" >RIV/68407700:21230/23:00366679 - isvavai.cz</a>

Výsledek na webu

<a href="https://adept.fyzika.uniza.sk/Proceedings_ADept_2023web.pdf" target="_blank" >https://adept.fyzika.uniza.sk/Proceedings_ADept_2023web.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Chemical vapor deposition of diamond fimls on QCM substrates

Popis výsledku v původním jazyce

The quartz crystal microbalance (QCM) represents an acoustic (mass) analytical platform suitable for the detection of gases and biomolecules in air and liquid, respectively. Several studies have shown that the sensing performance, sensitivity, and selectivity of QCMs are further enhanced by using an appropriate functional layer. Among others, diamond is one such attractive material thanks to its extraordinary properties. However, the use of standard CVD diamond growth procedures at 800 °C cannot be applied to the QCM substrate due to its low phase transition temperature (570 °C). An alternative solution here offers a low-temperature (400 °C) linear antenna microwave plasma. In this work, we demonstrate technological progress in diamond growth on QCM substrates in terms of maintaining their functionality and the ability to cover both sides in one deposition cycle due to the low pressure (<15 mbar) and placement of the QCM substrate in the so-called cold plasma region.

Název v anglickém jazyce

Chemical vapor deposition of diamond fimls on QCM substrates

Popis výsledku anglicky

The quartz crystal microbalance (QCM) represents an acoustic (mass) analytical platform suitable for the detection of gases and biomolecules in air and liquid, respectively. Several studies have shown that the sensing performance, sensitivity, and selectivity of QCMs are further enhanced by using an appropriate functional layer. Among others, diamond is one such attractive material thanks to its extraordinary properties. However, the use of standard CVD diamond growth procedures at 800 °C cannot be applied to the QCM substrate due to its low phase transition temperature (570 °C). An alternative solution here offers a low-temperature (400 °C) linear antenna microwave plasma. In this work, we demonstrate technological progress in diamond growth on QCM substrates in terms of maintaining their functionality and the ability to cover both sides in one deposition cycle due to the low pressure (<15 mbar) and placement of the QCM substrate in the so-called cold plasma region.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

20501 - Materials engineering

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the International Conference on Advances in Electronicc and Photonic Technologies, held in Tatranská Lomnica, High Tatras, Slovakia, June 12 – 15, 2023

ISBN

978-80-554-1977-0

ISSN

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e-ISSN

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Počet stran výsledku

4

Strana od-do

157-160

Název nakladatele

EDIS - Publishing Institution of the University of Zilina

Místo vydání

Žilina

Místo konání akce

Podbanské, High Tatras

Datum konání akce

12. 6. 2023

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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