Carbon Coatings Prepared by Magnetron Sputtering and Microwave Plasma Enhanced Chemical Vapor Deposition Measured by the Photothermal Deflection Spectroscopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21460%2F15%3A00241284" target="_blank" >RIV/68407700:21460/15:00241284 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1166/asem.2015.1697" target="_blank" >http://dx.doi.org/10.1166/asem.2015.1697</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1166/asem.2015.1697" target="_blank" >10.1166/asem.2015.1697</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Carbon Coatings Prepared by Magnetron Sputtering and Microwave Plasma Enhanced Chemical Vapor Deposition Measured by the Photothermal Deflection Spectroscopy

Popis výsledku v původním jazyce

The photothermal deflection spectroscopy (PDS) setup allows to measure simultaneously the absolute values of the optical transmittance T , reflectance R and absorptance A of thin layers on glass substrates from ultraviolet to near infrared spectral rangewith the typical spectral resolution 5 nm in the ultraviolet, 10 nm in the visible and 20 nm in the near infrared region. The PDS setup provides the dynamic detection range in the optical absorptance up to 4 orders of magnitude. Here we demonstrate theusability of this setup by comparing the optical absorptance on a series of the carbon layers and nanocrystalline diamond (NCD) thin layer deposited on glass substrates by using the magnetron sputtering and the microwave based surface wave-discharge in linear antenna chemical vapor deposition (CVD) processes, respectively. The defect-induced localized states in the energy gap are observed in all carbon layers as well as in NCD.

Název v anglickém jazyce

Carbon Coatings Prepared by Magnetron Sputtering and Microwave Plasma Enhanced Chemical Vapor Deposition Measured by the Photothermal Deflection Spectroscopy

Popis výsledku anglicky

The photothermal deflection spectroscopy (PDS) setup allows to measure simultaneously the absolute values of the optical transmittance T , reflectance R and absorptance A of thin layers on glass substrates from ultraviolet to near infrared spectral rangewith the typical spectral resolution 5 nm in the ultraviolet, 10 nm in the visible and 20 nm in the near infrared region. The PDS setup provides the dynamic detection range in the optical absorptance up to 4 orders of magnitude. Here we demonstrate theusability of this setup by comparing the optical absorptance on a series of the carbon layers and nanocrystalline diamond (NCD) thin layer deposited on glass substrates by using the magnetron sputtering and the microwave based surface wave-discharge in linear antenna chemical vapor deposition (CVD) processes, respectively. The defect-induced localized states in the energy gap are observed in all carbon layers as well as in NCD.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

—

Návaznosti

V - Vyzkumna aktivita podporovana z jinych verejnych zdroju

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Advanced Science, Engineering and Medicine

ISSN

2164-6635

e-ISSN

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Svazek periodika

7

Číslo periodika v rámci svazku

4

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

4

Strana od-do

321-324

Kód UT WoS článku

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EID výsledku v databázi Scopus

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