Filtry
Low Pressure RF Multi-Plasma-Jet System for Deposition of the Alloy and Composite Thin Films
A plasma-chemical reactor with a multi-plasma-jet RF hollow-cathode system has been developed for the deposition of alloy and composite thin films. Two primary plasma-jet channels and one...
BL - Fyzika plasmatu a výboje v plynech
- 2001 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Low-pressure rf multi-plasma jet system for deposition of alloy and composite thin films
Low-pressure rf multi-plasma jet system for deposition of alloy and composite thin films...
BL - Fyzika plasmatu a výboje v plynech
- 2001 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Low-pressure RF multi-plasma-jet system for deposition of alloy and composite films.
A plasma-chemical reactor with a multi-plasma-jet RF holow-cathode system has been developed for the deposition of alloy and composite thin films. Two primary plasma-jet channels and one ...
BM - Fyzika pevných látek a magnetismus
- 2001 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Copper nitride thin films prepared by the RF plasma chemical reactor with low pressure supersonic single and multi-plasma jet system
Copper nitride thin films prepared by the RF plasma chemical reactor with low pressure supersonic single and multi-plasma jet system......
BL - Fyzika plasmatu a výboje v plynech
- 1999 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
RF multi - plasma - jet system for deposition composite thin films
BL - Fyzika plasmatu a výboje v plynech
- 1998 •
- X
Rok uplatnění
X - Nezařazeno
Experiments with Forming Coated Sheets with Plasma-Chemical Pretreatment of the Surface
radius. In the context of experiments a multi-jet system was used. The aim of my previous publications and even this article is to achieve that by using of multi-jet plasma system, sampl...
JQ - Strojní zařízení a nástroje
- 2016 •
- Jx •
- Odkaz
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Výsledek na webu
Laboratory studies of multi-material radiative astrophysical jets propagation in plasmas
This work reports on results of a series of experiments dedicated to studying of plasma jets created by a simple method of matter ablation of multi-layer targets. The collimation and X-ray emission of multi-materia...
BL - Fyzika plasmatu a výboje v plynech
- 2010 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Device to control deposition of thin layers in vacuum multijet plasma system
by vacuum multi-plasma-jet system using plasma chemical reactions in the active zone of the plasma jet working on the principle of hollow cathode discharge burning in HCA regime......
BL - Fyzika plasmatu a výboje v plynech
- 2016 •
- Fuzit •
- Odkaz
Rok uplatnění
Fuzit - Užitný vzor
Výsledek na webu
Study of formability of coated sheets from the plasma chemical pretreatment of surfaces
adjust steel sheet with paint. In the experiment sis used multi-jet plasma system with which the physical nature of the effect lies in the generation of plasma at atmospheric pressure. The result of the a...
BL - Fyzika plasmatu a výboje v plynech
- 2013 •
- Jx
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Multi-SWD plasma jet system for PECVD deposition of thin films
Multiplasma jet surface-wave discharge launched by the surfatron is a promising PECVD tool for scalable deposition of various semiconductor materials. The timeresolved Langmuir probe study revealed that the plasma plume is inhomogen...
BL - Fyzika plasmatu a výboje v plynech
- 2014 •
- Jx •
- Odkaz
Rok uplatnění
Jx - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
Výsledek na webu
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