Non-equidistant scanning approach for millimetre-sized SPM measurements

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F12%3A%230000541" target="_blank" >RIV/00177016:_____/12:#0000541 - isvavai.cz</a>

Výsledek na webu

<a href="http://www.nanoscalereslett.com/content/7/1/213" target="_blank" >http://www.nanoscalereslett.com/content/7/1/213</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1186/1556-276X-7-213" target="_blank" >10.1186/1556-276X-7-213</a>

Jazyk výsledku

čeština

Název v původním jazyce

Non-equidistant scanning approach for millimetre-sized SPM measurements

Popis výsledku v původním jazyce

Abstract Long-range scanning probe microscope (SPM) measurements are usually extremely time consuming as many data need to be collected, and the microscope probe speed is limited. In this article, we present an adaptive measurement method for a large-area SPM. In contrast to the typically used line by line scanning with constant pixel spacing, we use an algorithm based on several levels of local re?nement in order to minimize the amount of information that would be useless in the data processing phase.The data obtained from the measurement are in general formed by xyz data sets that are triangulated back with a desired local resolution. This enables storing more relevant information from a single measurement as the data are interpolated and regularized in the data processing phase instead of during the measurement. In this article, we also discuss the in?uence of thermal drifts on the measured data and compare the presented algorithm to the standard matrix-based measuring approach.

Název v anglickém jazyce

Non-equidistant scanning approach for millimetre-sized SPM measurements

Popis výsledku anglicky

Abstract Long-range scanning probe microscope (SPM) measurements are usually extremely time consuming as many data need to be collected, and the microscope probe speed is limited. In this article, we present an adaptive measurement method for a large-area SPM. In contrast to the typically used line by line scanning with constant pixel spacing, we use an algorithm based on several levels of local re?nement in order to minimize the amount of information that would be useless in the data processing phase.The data obtained from the measurement are in general formed by xyz data sets that are triangulated back with a desired local resolution. This enables storing more relevant information from a single measurement as the data are interpolated and regularized in the data processing phase instead of during the measurement. In this article, we also discuss the in?uence of thermal drifts on the measured data and compare the presented algorithm to the standard matrix-based measuring approach.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JB - Senzory, čidla, měření a regulace

OECD FORD obor

—

Projekt

<a href="/cs/project/FR-TI1%2F241" target="_blank" >FR-TI1/241: Prvky pro nanometrickou diagnostiku délkových změn, tvarových úchylek a povrchových defektů</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Nanoscale Research Letters

ISSN

1556-276X

e-ISSN

—

Svazek periodika

2012

Číslo periodika v rámci svazku

7

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

7

Strana od-do

213-219

Kód UT WoS článku

—

EID výsledku v databázi Scopus

—