Fast mechanical model for probe–sample elastic deformation estimation in scanning probe microscopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F19%3AN0000107" target="_blank" >RIV/00177016:_____/19:N0000107 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216224:14310/19:00108245 RIV/00216305:26620/19:PU134551

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0304399118302638" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0304399118302638</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.ultramic.2019.03.010" target="_blank" >10.1016/j.ultramic.2019.03.010</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Fast mechanical model for probe–sample elastic deformation estimation in scanning probe microscopy

Popis výsledku v původním jazyce

We present a numerical approach for estimation of the probe-sample elastic deformation for higher contact forces and/or smaller probe apex radii in Scanning Probe Microscopy (SPM) measurements. It is based on a massspring model implemented on a graphics card in order to perform very high numbers of individual force-distance curves calculations in reasonable time, forming virtual profiles or virtual SPM images. The model is suitable for predicting the mechanical response of the probe and sample in SPM mechanical properties mapping regimes and for estimating the uncertainty sources related to probe-sample elastic deformation in dimensional nanometrology. As the model is based on using regular orthogonal mesh formed from the scanned surface topography, it can be also used as preprocessor for various pixel by pixel physical quantities calculations using Finite Difference Method, namely for the energy transfer between probe and sample, where a realistic probe- sample contact formation needs to be taken into account. Model performance is demonstrated via comparison to analytical solutions for simple contact mechanics tasks and its possibilities for SPM data interpretation are illustrated on measurements on simple reference structures, such as step edges or quantum dots.

Název v anglickém jazyce

Fast mechanical model for probe–sample elastic deformation estimation in scanning probe microscopy

Popis výsledku anglicky

We present a numerical approach for estimation of the probe-sample elastic deformation for higher contact forces and/or smaller probe apex radii in Scanning Probe Microscopy (SPM) measurements. It is based on a massspring model implemented on a graphics card in order to perform very high numbers of individual force-distance curves calculations in reasonable time, forming virtual profiles or virtual SPM images. The model is suitable for predicting the mechanical response of the probe and sample in SPM mechanical properties mapping regimes and for estimating the uncertainty sources related to probe-sample elastic deformation in dimensional nanometrology. As the model is based on using regular orthogonal mesh formed from the scanned surface topography, it can be also used as preprocessor for various pixel by pixel physical quantities calculations using Finite Difference Method, namely for the energy transfer between probe and sample, where a realistic probe- sample contact formation needs to be taken into account. Model performance is demonstrated via comparison to analytical solutions for simple contact mechanics tasks and its possibilities for SPM data interpretation are illustrated on measurements on simple reference structures, such as step edges or quantum dots.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Ultramicroscopy

ISSN

03043991

e-ISSN

—

Svazek periodika

—

Číslo periodika v rámci svazku

201

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

10

Strana od-do

18-27

Kód UT WoS článku

000466343800002

EID výsledku v databázi Scopus

2-s2.0-85063210936