Bringing real-time traceability to high-speed atomic force microscopy

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00177016%3A_____%2F20%3AN0000035" target="_blank" >RIV/00177016:_____/20:N0000035 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216305:26620/20:PU138469

Výsledek na webu

<a href="https://iopscience.iop.org/article/10.1088/1361-6501/ab7ca9" target="_blank" >https://iopscience.iop.org/article/10.1088/1361-6501/ab7ca9</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6501/ab7ca9" target="_blank" >10.1088/1361-6501/ab7ca9</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Bringing real-time traceability to high-speed atomic force microscopy

Popis výsledku v původním jazyce

In recent years, there has been growth in the development of high-speed AFMs, which offer the possibility of video rate scanning and long-range scanning over several hundred micrometres. However, until recently these instruments have been lacking full traceable metrology. In this paper traceable metrology, using optical interferometry, has been added to an open-loop contact-mode high-speed AFM to provide traceability both for short-range video rate images and large-area scans made using a combination of a high-speed dual-axis scanner and long-range positioning system. Using optical interferometry to determine stages' positions and cantilever displacement enables the direct formation of images, obviating the need for complex post-processing corrections to compensate for lateral stage error. The application of metrology increases the spatial accuracy and linearisation of the high-speed AFM measurements, enabling the generation of very large traceable composite images.

Název v anglickém jazyce

Bringing real-time traceability to high-speed atomic force microscopy

Popis výsledku anglicky

In recent years, there has been growth in the development of high-speed AFMs, which offer the possibility of video rate scanning and long-range scanning over several hundred micrometres. However, until recently these instruments have been lacking full traceable metrology. In this paper traceable metrology, using optical interferometry, has been added to an open-loop contact-mode high-speed AFM to provide traceability both for short-range video rate images and large-area scans made using a combination of a high-speed dual-axis scanner and long-range positioning system. Using optical interferometry to determine stages' positions and cantilever displacement enables the direct formation of images, obviating the need for complex post-processing corrections to compensate for lateral stage error. The application of metrology increases the spatial accuracy and linearisation of the high-speed AFM measurements, enabling the generation of very large traceable composite images.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

21100 - Other engineering and technologies

Projekt

<a href="/cs/project/7AX13020" target="_blank" >7AX13020: Metrology for movement and positioning in six degrees of freedom</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Measurement Science and Technology

ISSN

0957-0233

e-ISSN

1361-6501

Svazek periodika

31

Číslo periodika v rámci svazku

7

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

11

Strana od-do

—

Kód UT WoS článku

000531259600001

EID výsledku v databázi Scopus

2-s2.0-85085052684