Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F13%3A10191416" target="_blank" >RIV/00216208:11320/13:10191416 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1088/0963-0252/22/1/015020" target="_blank" >http://dx.doi.org/10.1088/0963-0252/22/1/015020</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0963-0252/22/1/015020" target="_blank" >10.1088/0963-0252/22/1/015020</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system

Popis výsledku v původním jazyce

We present results from two mutually independent measurements of plasma and neutral gas flow velocities in a plasma jet deposition system. Operation of a hollow-cathode discharge within the plasma jet nozzle in the pulse regime enables the simple use ofa classical Langmuir probe for the plasma flow velocity measurement. In this method, we assume that the plasma is generated solely inside the nozzle during the power impulse and we measure the time of flight of the ions along a known distance between thenozzle end and the probe. The plasma velocity at the plasma jet axis is then determined by differentiation of the dependence of the distance covered by ions on time. As the second method the well-known Pitot tube is used for measurement of the neutral gas velocity. By comparison of both methods we have experimentally proved that the neutral gas flow velocity is almost unaffected by the presence of the plasma, i.e. it does not substantially depend on whether the discharge is switched on

Název v anglickém jazyce

Measurement of the plasma and neutral gas flow velocities in a low-pressure hollow-cathode plasma jet sputtering system

Popis výsledku anglicky

We present results from two mutually independent measurements of plasma and neutral gas flow velocities in a plasma jet deposition system. Operation of a hollow-cathode discharge within the plasma jet nozzle in the pulse regime enables the simple use ofa classical Langmuir probe for the plasma flow velocity measurement. In this method, we assume that the plasma is generated solely inside the nozzle during the power impulse and we measure the time of flight of the ions along a known distance between thenozzle end and the probe. The plasma velocity at the plasma jet axis is then determined by differentiation of the dependence of the distance covered by ions on time. As the second method the well-known Pitot tube is used for measurement of the neutral gas velocity. By comparison of both methods we have experimentally proved that the neutral gas flow velocity is almost unaffected by the presence of the plasma, i.e. it does not substantially depend on whether the discharge is switched on

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

—

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

S - Specificky vyzkum na vysokych skolach<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Plasma Sources Science and Technology

ISSN

0963-0252

e-ISSN

—

Svazek periodika

22

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

7

Strana od-do

—

Kód UT WoS článku

000314966300025

EID výsledku v databázi Scopus

—