Floating harmonic probe measurements in the low-temperature plasma jet deposition system

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F18%3A10378879" target="_blank" >RIV/00216208:11320/18:10378879 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68378271:_____/18:00489658

Výsledek na webu

<a href="https://doi.org/10.1088/1361-6463/aa9d3b" target="_blank" >https://doi.org/10.1088/1361-6463/aa9d3b</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-6463/aa9d3b" target="_blank" >10.1088/1361-6463/aa9d3b</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Floating harmonic probe measurements in the low-temperature plasma jet deposition system

Popis výsledku v původním jazyce

The floating harmonic probe is a relatively new plasma diagnostic method, which was proposed for applications at conditions when insulating films are deposited on the probe and, consequently, the classical Langmuir probe method fails. In the floating harmonic probe method a purely sinusoidal AC voltage is applied to the probe constructed in a standard manner via a capacitor. From the spectral components of the measured AC probe current waveforms, the electron temperature and the positive ion density can be obtained. In this contribution we present the comparison of the electron temperature and density acquired by the floating harmonic probe method with those obtained by the classical Langmuir probe. The experiments are performed in the flowing DC discharge in argon. In addition, the results from the floating harmonic probe method obtained during deposition of an insulating iron oxide thin film are shown. All the data is complemented by the qualitative discussion.

Název v anglickém jazyce

Floating harmonic probe measurements in the low-temperature plasma jet deposition system

Popis výsledku anglicky

The floating harmonic probe is a relatively new plasma diagnostic method, which was proposed for applications at conditions when insulating films are deposited on the probe and, consequently, the classical Langmuir probe method fails. In the floating harmonic probe method a purely sinusoidal AC voltage is applied to the probe constructed in a standard manner via a capacitor. From the spectral components of the measured AC probe current waveforms, the electron temperature and the positive ion density can be obtained. In this contribution we present the comparison of the electron temperature and density acquired by the floating harmonic probe method with those obtained by the classical Langmuir probe. The experiments are performed in the flowing DC discharge in argon. In addition, the results from the floating harmonic probe method obtained during deposition of an insulating iron oxide thin film are shown. All the data is complemented by the qualitative discussion.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/GA15-00863S" target="_blank" >GA15-00863S: Studium impulzních plazmatických systémů k depozici tenkých vrstev pro fotonické aplikace</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Physics D - Applied Physics

ISSN

0022-3727

e-ISSN

—

Svazek periodika

51

Číslo periodika v rámci svazku

2

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

8

Strana od-do

—

Kód UT WoS článku

000418383500001

EID výsledku v databázi Scopus

2-s2.0-85039694504