Floating harmonic probe for diagnostic of pulsed discharges

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00512093" target="_blank" >RIV/68378271:_____/19:00512093 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216208:11320/19:10389488

Výsledek na webu

<a href="https://doi.org/10.1016/j.surfcoat.2018.10.039" target="_blank" >https://doi.org/10.1016/j.surfcoat.2018.10.039</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2018.10.039" target="_blank" >10.1016/j.surfcoat.2018.10.039</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Floating harmonic probe for diagnostic of pulsed discharges

Popis výsledku v původním jazyce

The floating harmonic probe (FHP) is a relatively new plasma diagnostic method for electron temperature and positive ion density measurement, which can be used in conditions when insulating films are being deposited on the probe and, consequently, the classical Langmuir probe method fails. Recently an extension of this method called PDHAM – phase delay harmonic analysis method - was proposed that is applicable also to pulsed discharges. In this contribution, we study the possible limitations of this new method and present the comparison of the plasma density and the electron temperature determined by PDHAM with that obtained by the time-resolved Langmuir probe in a pulsed planar magnetron discharge. In addition, we present the double probe technique for applications in pulsed plasmas and we compare its results with those of a single FHP. The experiments were performed in argon at pressures several Pa in a non-reactive regime, when no insulating film was deposited on the probes.n

Název v anglickém jazyce

Floating harmonic probe for diagnostic of pulsed discharges

Popis výsledku anglicky

The floating harmonic probe (FHP) is a relatively new plasma diagnostic method for electron temperature and positive ion density measurement, which can be used in conditions when insulating films are being deposited on the probe and, consequently, the classical Langmuir probe method fails. Recently an extension of this method called PDHAM – phase delay harmonic analysis method - was proposed that is applicable also to pulsed discharges. In this contribution, we study the possible limitations of this new method and present the comparison of the plasma density and the electron temperature determined by PDHAM with that obtained by the time-resolved Langmuir probe in a pulsed planar magnetron discharge. In addition, we present the double probe technique for applications in pulsed plasmas and we compare its results with those of a single FHP. The experiments were performed in argon at pressures several Pa in a non-reactive regime, when no insulating film was deposited on the probes.n

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/EF16_019%2F0000760" target="_blank" >EF16_019/0000760: Fyzika pevných látek pro 21. století</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

357

Číslo periodika v rámci svazku

Jan

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

7

Strana od-do

879-885

Kód UT WoS článku

000455691100110

EID výsledku v databázi Scopus

2-s2.0-85056200445