Hybrid HiPIMS + Cathodic Arc Ion Energy Distribution Function Measurement with Carbon Target

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216208%3A11320%2F24%3A10493218" target="_blank" >RIV/00216208:11320/24:10493218 - isvavai.cz</a>

Výsledek na webu

<a href="https://physics.mff.cuni.cz/wds/proc/pdf24/WDS24_18_f2_Naiko.pdf" target="_blank" >https://physics.mff.cuni.cz/wds/proc/pdf24/WDS24_18_f2_Naiko.pdf</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Hybrid HiPIMS + Cathodic Arc Ion Energy Distribution Function Measurement with Carbon Target

Popis výsledku v původním jazyce

Recently developed deposition system based on the combination ofHiPIMS and intentionally ignited cathode arc discharge working in different modesselected by mutual timing of HiPIMS and arc ignition has been studied. A planarmagnetron with an unbalanced magnetic field with a pure carbon target was used asthe sputtering plasma source. The experiments were performed at pressures of 1.4 Pain an argon environment. The measurements were carried out for Ar+, Ar++, C+ andC++ ions. The measurements showed the similarity of the IEDF for such ions Ar+,Ar++, C+ within the same mode, while the situation changes dramatically in the caseof C++. Compared to hybrid modes, the IEDF in HiPIMS mode is characterised bythe long-lived population of Ar+, Ar++, C+. However, C++ is present in the plasmafor a much longer time in all Hybrid HiPIMS modes than in HiPIMS.

Název v anglickém jazyce

Hybrid HiPIMS + Cathodic Arc Ion Energy Distribution Function Measurement with Carbon Target

Popis výsledku anglicky

Recently developed deposition system based on the combination ofHiPIMS and intentionally ignited cathode arc discharge working in different modesselected by mutual timing of HiPIMS and arc ignition has been studied. A planarmagnetron with an unbalanced magnetic field with a pure carbon target was used asthe sputtering plasma source. The experiments were performed at pressures of 1.4 Pain an argon environment. The measurements were carried out for Ar+, Ar++, C+ andC++ ions. The measurements showed the similarity of the IEDF for such ions Ar+,Ar++, C+ within the same mode, while the situation changes dramatically in the caseof C++. Compared to hybrid modes, the IEDF in HiPIMS mode is characterised bythe long-lived population of Ar+, Ar++, C+. However, C++ is present in the plasmafor a much longer time in all Hybrid HiPIMS modes than in HiPIMS.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2024

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

WDS&apos;24 Proceedings of Contributed Papers - Physics

ISBN

978-80-7378-520-8

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

131-136

Název nakladatele

Matfyzpress

Místo vydání

Praha

Místo konání akce

Praha

Datum konání akce

4. 6. 2024

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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