Měření iontů a sondové měření v kapacitně vázaných výbojích v argonu a dusíku

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F04%3A00010679" target="_blank" >RIV/00216224:14310/04:00010679 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Ion and Probe Measurements in rf Capacitive Discharges in Argon and Nitrogen

Popis výsledku v původním jazyce

We used Langmuir probe and Balzers PPM to determine plasma potential, electron concentration, energy of ions and plasma potential in Ar and N2 discharge. Both diagnostic devices were oriented parallel. The movable electrodes allow a perpendicular spatially resolved measurements. The ion energy distribution (IED) measured at the high power is the same as at the grounded electrode. It exhibited only one peak which was typically found for low voltage modulated r.f. sheaths (the case of grounded electrode).The mean energy of Ar+ and N2+ ions was about 92~% of the energy related to the plasma potential. Moreover, low energy electron tail appeared in their IEDs. These both facts are explained by collisions in the sheath. Not observed effect of collisions in N+ ions IEDs. The ion mean energies decreased towards the grounded electrodes in agreement with the plasma potential. The ion and electron concentrations showed similar profiles (maximum about 12~mm above the grounded electrode).

Název v anglickém jazyce

Ion and Probe Measurements in rf Capacitive Discharges in Argon and Nitrogen

Popis výsledku anglicky

We used Langmuir probe and Balzers PPM to determine plasma potential, electron concentration, energy of ions and plasma potential in Ar and N2 discharge. Both diagnostic devices were oriented parallel. The movable electrodes allow a perpendicular spatially resolved measurements. The ion energy distribution (IED) measured at the high power is the same as at the grounded electrode. It exhibited only one peak which was typically found for low voltage modulated r.f. sheaths (the case of grounded electrode).The mean energy of Ar+ and N2+ ions was about 92~% of the energy related to the plasma potential. Moreover, low energy electron tail appeared in their IEDs. These both facts are explained by collisions in the sheath. Not observed effect of collisions in N+ ions IEDs. The ion mean energies decreased towards the grounded electrodes in agreement with the plasma potential. The ion and electron concentrations showed similar profiles (maximum about 12~mm above the grounded electrode).

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2004

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

WDS'04 Proceedings of Contributed papers, Part II

ISBN

80-86732-32-0

ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

333-338

Název nakladatele

MATFYZPRESS

Místo vydání

Praha

Místo konání akce

Praha

Datum konání akce

1. 1. 2004

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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