Prostorově rozlišená měření Langmuirovou sondou ve vodíkovém rf výboji

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F05%3A00012710" target="_blank" >RIV/00216224:14310/05:00012710 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Spatially resolved probe measurements in hydrogen rf discharges

Popis výsledku v původním jazyce

The electron energy distribution (EED) was measured by means of the Langmuir probe in hydrogen capacitively coupled rf discharge at three different pressures (2.5, 10 and 85,Pa). In order to obtain the spatially resolved EEDs the probe tip was moved along the discharge axis and the plasma parameters were measured at different distances from the electrodes. An unusually high electron energy at the lowest pressure was observed having its maximum at the sheath edge, where the maximum of the electron concentration was also located. On the other hand, at higher pressures the electron concentration was maximum inside the plasma bulk. When the pressure was increased, the increase of the electron concentration, decrease of the mean electron energy, changes ofthe nonlocal discharge character towards the local character and the development of the sheath at the grounded electrode were observed. A high-energy group of electrons coming from the sheaths at the highest pressure was detected.

Název v anglickém jazyce

Spatially resolved probe measurements in hydrogen rf discharges

Popis výsledku anglicky

The electron energy distribution (EED) was measured by means of the Langmuir probe in hydrogen capacitively coupled rf discharge at three different pressures (2.5, 10 and 85,Pa). In order to obtain the spatially resolved EEDs the probe tip was moved along the discharge axis and the plasma parameters were measured at different distances from the electrodes. An unusually high electron energy at the lowest pressure was observed having its maximum at the sheath edge, where the maximum of the electron concentration was also located. On the other hand, at higher pressures the electron concentration was maximum inside the plasma bulk. When the pressure was increased, the increase of the electron concentration, decrease of the mean electron energy, changes ofthe nonlocal discharge character towards the local character and the development of the sheath at the grounded electrode were observed. A high-energy group of electrons coming from the sheaths at the highest pressure was detected.

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GD202%2F03%2FH162" target="_blank" >GD202/03/H162: Pokročilé směry ve fyzice a chemii plazmatu</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2005

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 14th Annual Conference of Doctoral Students - WDS 2005

ISBN

80-86732-59-2

ISSN

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e-ISSN

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Počet stran výsledku

5

Strana od-do

368-372

Název nakladatele

Matfyzpress

Místo vydání

Praha

Místo konání akce

Praha

Datum konání akce

1. 1. 2005

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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