Vliv stínění na elipsometrické veličiny náhodně drsných povrchů a tenkých vrstev

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F08%3A00026336" target="_blank" >RIV/00216224:14310/08:00026336 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Influence of shadowing on ellipsometric quantities of randomly rough surfaces and thin films

Popis výsledku v původním jazyce

The formulae enabling us to calculate the values of the ellipsometric parameters of randomly rough surfaces and very thin films with randomly rough boundaries with respect to the influence of the shadowing between the irregularities of roughness are presented. These formulae are derived within the scalar diffraction theory of light. The first formula allows the calculation of the ellipsometric parameters using a numerical method, while the second formula is the approximative one but it expresses the ellipsometric parameters in a closed form. The numerical analysis of both formulae is performed for several examples of randomly rough surfaces and thin films. Moreover, the comparison of the results achieved using both formulae respecting the shadowing andan earlier formula not including this effect is performed. The experimental data of two samples of the randomly rough silicon surfaces covered with very thin surface layers are interpreted using all the formulae mentioned. Using this exp

Název v anglickém jazyce

Influence of shadowing on ellipsometric quantities of randomly rough surfaces and thin films

Popis výsledku anglicky

The formulae enabling us to calculate the values of the ellipsometric parameters of randomly rough surfaces and very thin films with randomly rough boundaries with respect to the influence of the shadowing between the irregularities of roughness are presented. These formulae are derived within the scalar diffraction theory of light. The first formula allows the calculation of the ellipsometric parameters using a numerical method, while the second formula is the approximative one but it expresses the ellipsometric parameters in a closed form. The numerical analysis of both formulae is performed for several examples of randomly rough surfaces and thin films. Moreover, the comparison of the results achieved using both formulae respecting the shadowing andan earlier formula not including this effect is performed. The experimental data of two samples of the randomly rough silicon surfaces covered with very thin surface layers are interpreted using all the formulae mentioned. Using this exp

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2008

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of modern optics

ISSN

0950-0340

e-ISSN

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Svazek periodika

55

Číslo periodika v rámci svazku

7

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

23

Strana od-do

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Kód UT WoS článku

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EID výsledku v databázi Scopus

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