Degradation of mechanical properties of nitrogen-doped organosilicon plasma polymers induced by post-deposition reactions

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F25%3A00142412" target="_blank" >RIV/00216224:14310/25:00142412 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S2468023025015895" target="_blank" >https://www.sciencedirect.com/science/article/pii/S2468023025015895</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfin.2025.107337" target="_blank" >10.1016/j.surfin.2025.107337</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Degradation of mechanical properties of nitrogen-doped organosilicon plasma polymers induced by post-deposition reactions

Popis výsledku v původním jazyce

Organosilicon plasma-polymer coatings based on hexamethyldisiloxane (HMDSO) are versatile materials with a wide range of applications. However, the degradation of their mechanical properties has not been extensively studied, despite growing application-oriented interest. This study focuses on evaluating the aging of mechanical properties in plasma-polymerized hexamethyldisiloxane (ppHMDSO) coatings, driven by structural changes over time. We investigate the chemical interactions of nitrogen-doped organosilicon thin films with ambient atmosphere under controlled laboratory conditions. These films were prepared via plasma-enhanced chemical vapor deposition (PECVD) using a capacitively coupled radio-frequency (RF) glow discharge in a mixture of HMDSO and N2. To assess the time-dependent mechanical properties of these rapidly degrading plasma polymers, nanoindentation and microindentation techniques were employed. Quasi-static partial unloading (QSpul) experiments and differential hardness (HD) measurements were also conducted to analyze how mechanical properties evolve with structural changes during aging. Trends in the mechanical properties were correlated with FTIR and XPS analyses to provide insights into the underlying aging mechanisms of nitrogen-doped HMDSO thin films.

Název v anglickém jazyce

Degradation of mechanical properties of nitrogen-doped organosilicon plasma polymers induced by post-deposition reactions

Popis výsledku anglicky

Organosilicon plasma-polymer coatings based on hexamethyldisiloxane (HMDSO) are versatile materials with a wide range of applications. However, the degradation of their mechanical properties has not been extensively studied, despite growing application-oriented interest. This study focuses on evaluating the aging of mechanical properties in plasma-polymerized hexamethyldisiloxane (ppHMDSO) coatings, driven by structural changes over time. We investigate the chemical interactions of nitrogen-doped organosilicon thin films with ambient atmosphere under controlled laboratory conditions. These films were prepared via plasma-enhanced chemical vapor deposition (PECVD) using a capacitively coupled radio-frequency (RF) glow discharge in a mixture of HMDSO and N2. To assess the time-dependent mechanical properties of these rapidly degrading plasma polymers, nanoindentation and microindentation techniques were employed. Quasi-static partial unloading (QSpul) experiments and differential hardness (HD) measurements were also conducted to analyze how mechanical properties evolve with structural changes during aging. Trends in the mechanical properties were correlated with FTIR and XPS analyses to provide insights into the underlying aging mechanisms of nitrogen-doped HMDSO thin films.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surfaces and Interfaces

ISSN

2468-0230

e-ISSN

—

Svazek periodika

74

Číslo periodika v rámci svazku

October

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

12

Strana od-do

107337

Kód UT WoS článku

001584876000007

EID výsledku v databázi Scopus

2-s2.0-105016172847