Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14310%2F25%3A00142453" target="_blank" >RIV/00216224:14310/25:00142453 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.surfcoat.2025.132847" target="_blank" >https://doi.org/10.1016/j.surfcoat.2025.132847</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2025.132847" target="_blank" >10.1016/j.surfcoat.2025.132847</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM

Popis výsledku v původním jazyce

This paper presents measurements of particle fluxes at the substrate during a HiPIMS discharge using a novel biasable quartz crystal microbalance system, enabling detection of Ti neutrals, Ti ions, and, for the first time, Ar ions. Two target geometries were compared at equal power density and peak current density, and two different power supplies were tested under nominally identical conditions to assess the role of generator design. The study shows that particle fluxes are strongly affected by target geometry, pressure, and generator type. The rectangular target produced higher and more variable fluxes than the circular one, while increasing pressure consistently reduced them. Differences between generators mainly influenced the balance between Ti neutrals and ions, whereas Ar ion fluxes remained similar. Overall, Ar ion fluxes were consistently dominant, exceeding Ti ion fluxes by about an order of magnitude.

Název v anglickém jazyce

Quantifying argon and metal ion fluxes in HiPIMS using a biasable QCM

Popis výsledku anglicky

This paper presents measurements of particle fluxes at the substrate during a HiPIMS discharge using a novel biasable quartz crystal microbalance system, enabling detection of Ti neutrals, Ti ions, and, for the first time, Ar ions. Two target geometries were compared at equal power density and peak current density, and two different power supplies were tested under nominally identical conditions to assess the role of generator design. The study shows that particle fluxes are strongly affected by target geometry, pressure, and generator type. The rectangular target produced higher and more variable fluxes than the circular one, while increasing pressure consistently reduced them. Differences between generators mainly influenced the balance between Ti neutrals and ions, whereas Ar ion fluxes remained similar. Overall, Ar ion fluxes were consistently dominant, exceeding Ti ion fluxes by about an order of magnitude.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10508 - Physical geography

Projekt

<a href="/cs/project/LM2023039" target="_blank" >LM2023039: Centrum výzkumu a vývoje plazmatu a nanotechnologických povrchových úprav</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

1879-3347

Svazek periodika

517

Číslo periodika v rámci svazku

December

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

11

Strana od-do

132847

Kód UT WoS článku

001608169200003

EID výsledku v databázi Scopus

2-s2.0-105019639824