Elipsometrie při charakterizaci tenkých vrstev

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14330%2F05%3A00013302" target="_blank" >RIV/00216224:14330/05:00013302 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Ellipsometry in characterization of thin films

Popis výsledku v původním jazyce

In this paper the principles of ellipsometry together with a description of important ellipsometric techniques are briefly presented. A general classification of the ellipsometric methods significant from the practical point of view is performed as well.Furthermore, the general principles of the optical characterization of thin film systems are introduced. Thus, the main steps for creating the structural models of the thin film systems are described together with classification of the mathematical formalism usable for deriving the formulae usable for the optical characterization of the system mentioned. The three significant dispersion models enabling us to express the spectral dependences of the optical constants of the amorphous dielectric and semiconductor thin films within the wide spectral region are also described, i.e. the Tauc-Lorentz model, Ferlauto et al. model and model based on parameterization of the density of electronic states are discussed. Three examples of the optical

Název v anglickém jazyce

Ellipsometry in characterization of thin films

Popis výsledku anglicky

In this paper the principles of ellipsometry together with a description of important ellipsometric techniques are briefly presented. A general classification of the ellipsometric methods significant from the practical point of view is performed as well.Furthermore, the general principles of the optical characterization of thin film systems are introduced. Thus, the main steps for creating the structural models of the thin film systems are described together with classification of the mathematical formalism usable for deriving the formulae usable for the optical characterization of the system mentioned. The three significant dispersion models enabling us to express the spectral dependences of the optical constants of the amorphous dielectric and semiconductor thin films within the wide spectral region are also described, i.e. the Tauc-Lorentz model, Ferlauto et al. model and model based on parameterization of the density of electronic states are discussed. Three examples of the optical

Druh

D - Stať ve sborníku

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/GA203%2F05%2F0524" target="_blank" >GA203/05/0524: Fotonická skla a amorfní vrstvy</a><br>

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2005

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the SREN 2005

ISBN

80-223-2099-4

ISSN

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e-ISSN

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Počet stran výsledku

31

Strana od-do

81-111

Název nakladatele

Comenius University

Místo vydání

Bratislava, Slovakia

Místo konání akce

Florence, Italy

Datum konání akce

2. 4. 2005

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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