Protective double-layer coatings prepared by plasma enhanced chemical vapor deposition on tool steel

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F15%3A00084643" target="_blank" >RIV/00216224:14740/15:00084643 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/61389005:_____/15:00445107 RIV/00177016:_____/15:#0001229

Výsledek na webu

<a href="http://www.sciencedirect.com/science/article/pii/S0257897215003217" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0257897215003217</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2015.04.002" target="_blank" >10.1016/j.surfcoat.2015.04.002</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Protective double-layer coatings prepared by plasma enhanced chemical vapor deposition on tool steel

Popis výsledku v původním jazyce

Hydrogenated diamond-like carbon films were prepared on high-speed steel substrates using low pressure radio-frequency capacitively coupled discharge (13.56 MHz) using methane mixed either with hydrogen or argon. A dc self-bias was induced by the rf discharge and accelerated the ions towards the substrates during the whole deposition process. Prior to the carbon film deposition and to improve the adhesion, the substrates were subject to plasma nitriding and coated with a silicon oxide layer using the same reactor. The deposited films were optically characterized (UV-IR) and by using a combination of Rutherford backscattering spectroscopy and elastic recoil detection the atomic composition was determined. The carbon films high hardness (similar to 18 GPa) was assessed from indentation tests. Adhesion tests revealed critical loads up to 13.6 N for the carbon films deposited on steel substrates using silicon oxide interlayer. Friction coefficient varied from 0.02 against diamond and 0.

Název v anglickém jazyce

Protective double-layer coatings prepared by plasma enhanced chemical vapor deposition on tool steel

Popis výsledku anglicky

Hydrogenated diamond-like carbon films were prepared on high-speed steel substrates using low pressure radio-frequency capacitively coupled discharge (13.56 MHz) using methane mixed either with hydrogen or argon. A dc self-bias was induced by the rf discharge and accelerated the ions towards the substrates during the whole deposition process. Prior to the carbon film deposition and to improve the adhesion, the substrates were subject to plasma nitriding and coated with a silicon oxide layer using the same reactor. The deposited films were optically characterized (UV-IR) and by using a combination of Rutherford backscattering spectroscopy and elastic recoil detection the atomic composition was determined. The carbon films high hardness (similar to 18 GPa) was assessed from indentation tests. Adhesion tests revealed critical loads up to 13.6 N for the carbon films deposited on steel substrates using silicon oxide interlayer. Friction coefficient varied from 0.02 against diamond and 0.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

—

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface & coatings technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

272

Číslo periodika v rámci svazku

June

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

10

Strana od-do

229-238

Kód UT WoS článku

000355055600027

EID výsledku v databázi Scopus

—