Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F17%3A00097537" target="_blank" >RIV/00216224:14740/17:00097537 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0257897216310659?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0257897216310659?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2016.10.068" target="_blank" >10.1016/j.surfcoat.2016.10.068</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge

Popis výsledku v původním jazyce

We present a combined experimental and numerical study of plasma co-polymerization of maleic anhydride and acetylene in an atmospheric-pressure dielectric-barrier discharge. It combines a three-dimensional model of the gas dynamics in close-to-real geometry with a semi-analytical model of the deposition which reduces the unknown plasma chemistry into several averaged species. The unknown coefficients of the model are found by correlating it with measurements of film thickness at various deposition conditions. Even though the model is calibrated only based on spatially-resolved thickness, it is proven using FT-IR that it also makes valid predictions regarding the film composition. The predictive capabilities of the model are also tested on independent experiments, illustrating that the model retains its predictive capabilities even outside of the calibration region. The work aims not only to provide more insight into the specific deposition process but it also illustrates efficient use of numerical modelling in process control and design. (C) 2016 Elsevier B.V. All rights reserved.

Název v anglickém jazyce

Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge

Popis výsledku anglicky

We present a combined experimental and numerical study of plasma co-polymerization of maleic anhydride and acetylene in an atmospheric-pressure dielectric-barrier discharge. It combines a three-dimensional model of the gas dynamics in close-to-real geometry with a semi-analytical model of the deposition which reduces the unknown plasma chemistry into several averaged species. The unknown coefficients of the model are found by correlating it with measurements of film thickness at various deposition conditions. Even though the model is calibrated only based on spatially-resolved thickness, it is proven using FT-IR that it also makes valid predictions regarding the film composition. The predictive capabilities of the model are also tested on independent experiments, illustrating that the model retains its predictive capabilities even outside of the calibration region. The work aims not only to provide more insight into the specific deposition process but it also illustrates efficient use of numerical modelling in process control and design. (C) 2016 Elsevier B.V. All rights reserved.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

<a href="/cs/project/LQ1601" target="_blank" >LQ1601: CEITEC 2020</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

SURFACE & COATINGS TECHNOLOGY

ISSN

0257-8972

e-ISSN

—

Svazek periodika

314

Číslo periodika v rámci svazku

MAR

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

9

Strana od-do

139-147

Kód UT WoS článku

000397696400022

EID výsledku v databázi Scopus

2-s2.0-85014964645