Optical Characterization of Thin Films by Means of Imaging Spectroscopic Reflectometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216224%3A14740%2F18%3A00106640" target="_blank" >RIV/00216224:14740/18:00106640 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1007/978-3-319-75325-6_5" target="_blank" >http://dx.doi.org/10.1007/978-3-319-75325-6_5</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/978-3-319-75325-6_5" target="_blank" >10.1007/978-3-319-75325-6_5</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical Characterization of Thin Films by Means of Imaging Spectroscopic Reflectometry

Popis výsledku v původním jazyce

This chapter focuses on optical characterization of thin films by means of non-microscopic imaging spectroscopic reflectometry. This technique is primarily intended for characterization of thin films with an area non-uniformity in their optical properties. An advantage of the technique is the possibility to measure along a relatively large area of the measured films. The motivation for development and exploitation of this technique is also discussed. Essential features and implementation of the technique are given, as well as the basic experimental set-up of imaging spectroscopic reflectometers and the way the experimental data are obtained. The data processing methods are classified based on the purpose of the thin film measurement. Furthermore, this chapter presents examples of results of imaging spectroscopic reflectometry in the field of thin films. At the end of the chapter, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.

Název v anglickém jazyce

Optical Characterization of Thin Films by Means of Imaging Spectroscopic Reflectometry

Popis výsledku anglicky

This chapter focuses on optical characterization of thin films by means of non-microscopic imaging spectroscopic reflectometry. This technique is primarily intended for characterization of thin films with an area non-uniformity in their optical properties. An advantage of the technique is the possibility to measure along a relatively large area of the measured films. The motivation for development and exploitation of this technique is also discussed. Essential features and implementation of the technique are given, as well as the basic experimental set-up of imaging spectroscopic reflectometers and the way the experimental data are obtained. The data processing methods are classified based on the purpose of the thin film measurement. Furthermore, this chapter presents examples of results of imaging spectroscopic reflectometry in the field of thin films. At the end of the chapter, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10305 - Fluids and plasma physics (including surface physics)

Projekt

—

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

OPTICAL CHARACTERIZATION OF THIN SOLID FILMS

ISSN

0931-5195

e-ISSN

—

Svazek periodika

64

Číslo periodika v rámci svazku

2018

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

35

Strana od-do

107-141

Kód UT WoS článku

000441388800007

EID výsledku v databázi Scopus

2-s2.0-85043764143