Optical Characterization Of Thin Films by Means of Imaging Spectroscopic Reflectometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F18%3APU130895" target="_blank" >RIV/00216305:26210/18:PU130895 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Optical Characterization Of Thin Films by Means of Imaging Spectroscopic Reflectometry

Popis výsledku v původním jazyce

Non-microscopic imaging spectroscopic reflectometry for optical characterization of thin films is described. This technique is primarily intended for characterization of thin films with area non-uniformity in their optical properties. The characterization can be carried out along a relatively large area of the measured films. The motivation for the development and exploitation of this technique is also discussed. The essential features and the implementation of the technique are provided together with the basic experimental set up of imaging spectroscopic reflectometers. The way of acquiring the experimental data is described. The experimental data processing methods are classified from the point of view of the way in which information contained in the image of the film measured is exploited. Furthermore, specific examples of results measured by imaging spectroscopic reflectometry in the field of thin film optics are introduced. At the end, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.

Název v anglickém jazyce

Optical Characterization Of Thin Films by Means of Imaging Spectroscopic Reflectometry

Popis výsledku anglicky

Non-microscopic imaging spectroscopic reflectometry for optical characterization of thin films is described. This technique is primarily intended for characterization of thin films with area non-uniformity in their optical properties. The characterization can be carried out along a relatively large area of the measured films. The motivation for the development and exploitation of this technique is also discussed. The essential features and the implementation of the technique are provided together with the basic experimental set up of imaging spectroscopic reflectometers. The way of acquiring the experimental data is described. The experimental data processing methods are classified from the point of view of the way in which information contained in the image of the film measured is exploited. Furthermore, specific examples of results measured by imaging spectroscopic reflectometry in the field of thin film optics are introduced. At the end, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.

Druh

C - Kapitola v odborné knize

CEP obor

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OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název knihy nebo sborníku

Optical Characterization of Thin Solid Films

ISBN

978-3-319-75324-9

Počet stran výsledku

34

Strana od-do

107-141

Počet stran knihy

462

Název nakladatele

Springer International Publishing AG Part of Springer Nature

Místo vydání

Cham, Switzerland

Kód UT WoS kapitoly

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