Optical Characterization of Materials by Spectroscopic Ellipsometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F19%3A39914970" target="_blank" >RIV/00216275:25310/19:39914970 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Optical Characterization of Materials by Spectroscopic Ellipsometry

Popis výsledku v původním jazyce

SE is a phase-sensitive optical tool that utilizes light polarization (more precisely, its change under light reflection) for surface characterization. It provides surface geometrical parameters such as, for example, the overlayer thickness, the inner structure of a film or surface profile of a grating and also the optical constants of materials that the light senses by its penetration beneath the surface. This technique is not direct, in the sense that ellipsometry data treatment usually requires design of a sample model and subsequent fitting of experimental ellipsometric spectra. Appropriate combination of SE with complementary surface characterization tools guarantees precise and accurate results. The field of ellipsometry is growing continuously, and its potential is being applied for characterization of advance functionalized surfaces and nanomaterials.

Název v anglickém jazyce

Optical Characterization of Materials by Spectroscopic Ellipsometry

Popis výsledku anglicky

SE is a phase-sensitive optical tool that utilizes light polarization (more precisely, its change under light reflection) for surface characterization. It provides surface geometrical parameters such as, for example, the overlayer thickness, the inner structure of a film or surface profile of a grating and also the optical constants of materials that the light senses by its penetration beneath the surface. This technique is not direct, in the sense that ellipsometry data treatment usually requires design of a sample model and subsequent fitting of experimental ellipsometric spectra. Appropriate combination of SE with complementary surface characterization tools guarantees precise and accurate results. The field of ellipsometry is growing continuously, and its potential is being applied for characterization of advance functionalized surfaces and nanomaterials.

Druh

C - Kapitola v odborné knize

CEP obor

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OECD FORD obor

10306 - Optics (including laser optics and quantum optics)

Projekt

<a href="/cs/project/LM2015082" target="_blank" >LM2015082: Centrum materiálů a nanotechnologií</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2019

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název knihy nebo sborníku

Optical Properties of Materials and Their Applications

ISBN

978-1-119-50631-7

Počet stran výsledku

30

Strana od-do

435-464

Počet stran knihy

644

Název nakladatele

Wiley

Místo vydání

London

Kód UT WoS kapitoly

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